Muller, Richard Stephen

Article from CaltechAUTHORS

• Choo, Hyuck and Muller, Richard S. (2007) Devices, Structures, and Processes for Optical MEMS; IEEJ Transactions on Electrical and Electronic Engineering; Vol. 2; No. 3; 216-231; 10.1002/tee.20156
• Choo, Hyuck and Garmire, David, el al. (2007) Simple Fabrication Process for Self-Aligned, High-Performance Microscanners—Demonstrated Use to Generate a 2-D Ablation Pattern; Journal of Microelectromechanical Systems; Vol. 16; No. 2; 260-268; 10.1109/JMEMS.2007.895048
• Choo, Hyuck and Muller, Richard S. (2006) Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors; Journal of Microelectromechanical Systems; Vol. 15; No. 6; 1555-1567; 10.1109/JMEMS.2006.886011
• Kim, Jongbaeg and Choo, Hyuck, el al. (2006) Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon; Journal of Microelectromechanical Systems; Vol. 15; No. 3; 553-562; 10.1109/JMEMS.2006.876789
• Fan, Long-Sheng and Tai, Yu-Chong, el al. (1988) Integrated movable micromechanical structures for sensors and actuators; IEEE Transactions on Electron Devices; Vol. 35; No. 6; 724-730; 10.1109/16.2523