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Liu, Jianqiang
Book Chapter from
CaltechAUTHORS
Liu, Jianqiang and Tai, Yu-Chong, el al. (1993)
In situ monitoring and universal modelling of sacrificial PSG etching using hydrofluoric acid
; ISBN 0-7803-0957-X; [1993] Proceedings IEEE Micro Electro Mechanical Systems; 71-76;
10.1109/MEMSYS.1993.296954
