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Grosjean, Charles
Article from
CaltechAUTHORS
Yang, Xing and Grosjean, Charles, et el. (1999)
Design, fabrication, and testing of micromachined silicone rubbermembrane valves
; Journal of Microelectromechanical Systems; Vol. 8; No. 4; 393-402;
10.1109/84.809053
