Chen, Jen-Sue

Book Chapter from CaltechAUTHORS

• Kolawa, Elizabeth A. and Reid, J. S., et el. (1993) Amorphous metallic alloys: a new advance in thin-film diffusion barriers for copper metallization; ISBN 9780819410030; Submicrometer Metallization: Challenges, Opportunities, and Limitations; 11-17; 10.1117/12.145460