Atwater, Harry A

(orcid 0000-0001-9435-0201)

Patent(s) from CaltechAUTHORS

• Flagan, Richard C.; Atwater, Harry A. et al. (2004) Aerosol process for fabricating discontinuous floating gate microelectronic devices https://resolver.caltech.edu/CaltechAUTHORS:20150909-170622621

• Flagan, Richard C.; Boer, Elizabeth A. et al. (2003) Aerosol silicon nanoparticles for use in semiconductor device fabrication https://resolver.caltech.edu/CaltechAUTHORS:20150909-170253333