@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120521-095551303,
    title = "Proceedings of the first international workshop on Network-aware data management",
    chapter = "Scientific data movement enabled by the DYNES instrument",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120521-095551303",
    id = "record",
    isbn = "978-1-4503-1132-8",
    doi = "10.1145/2110217.2110224"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170522-165050873,
    title = "Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems",
    chapter = "A thermopneumatic microfluidic system",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170522-165050873",
    id = "record",
    isbn = "0-7803-7185-2",
    doi = "10.1109/MEMSYS.2002.984051"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190409-141256969,
    title = "Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems",
    chapter = "Surface micromachined leakage proof Parylene check valve",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190409-141256969",
    id = "record",
    isbn = "0-7803-5998-4",
    doi = "10.1109/MEMSYS.2001.906598"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20200127-100810992,
    title = "Transducers '01 Eurosensors XV",
    chapter = "BrF₃ Dry Release Technology for Large Freestanding Parylene MEMS",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20200127-100810992",
    id = "record",
    isbn = "978-3-540-42150-4",
    doi = "10.1007/978-3-642-59497-7\_155"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170523-165039037,
    title = "Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems",
    chapter = "A practical thermopneumatic valve",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170523-165039037",
    id = "record",
    isbn = "0-7803-5194-0",
    doi = "10.1109/MEMSYS.1999.746792"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:YANmems98,
    title = "International Workshop on Micro Electro Mechanical Systems,11th (MEMS 98), Heidelberg, Germany, 25-29 January 1998",
    chapter = "Micromachined membrane particle filters",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:YANmems98",
    id = "record",
    isbn = "0-7803-4412-X",
    doi = "10.1109/MEMSYS.1998.659743"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20110620-160422991,
    title = "Transducers '97: Digest of Technical Papers",
    chapter = "Microfluidic sub-millisecond mixers for the study of chemical reaction kinetics",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20110620-160422991",
    id = "record",
    isbn = "0-7803-3829-4",
    doi = "10.1109/SENSOR.1997.613609"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170525-161134683,
    title = "Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)",
    chapter = "Gas-phase Silicon Etching With Bromine Trifluoride",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170525-161134683",
    id = "record",
    isbn = "0-7803-3829-4",
    doi = "10.1109/SENSOR.1997.635751"
}