@other{https://resolver.caltech.edu/CaltechETD:etd-09232002-150110, title = "Characterization and application of MeV ion implanted layers in III-V compound semiconductors", url = "https://resolver.caltech.edu/CaltechETD:etd-09232002-150110", id = "record", doi = "10.7907/yjk5-wv20" }