@other{https://resolver.caltech.edu/CaltechETD:etd-11092006-110012,
    title = "Through-wafer 3-D micromachining and its applications for neural interfaces and microrelays",
    year = "1999",
    url = "https://resolver.caltech.edu/CaltechETD:etd-11092006-110012",
    id = "record",
    doi = "10.7907/g4sj-2q41"
}