@other{https://resolver.caltech.edu/CaltechETD:etd-09062005-112235,
    title = "Integrated parylene micro electro mechanical systems (MEMS)",
    year = "2000",
    url = "https://resolver.caltech.edu/CaltechETD:etd-09062005-112235",
    id = "record",
    doi = "10.7907/qe8x-ca65"
}