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    title = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)",
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    title = "Micropyramid-patterned, oxygen-permeable bottomed dish for high density culture of pancreatic islets",
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    chapter = "Photodefinable silicone MEMS gaskets and O-rings for microfluidics packaging",
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    title = "Proceedings IEEE the twentieth annual International Conference on Micro Electro Mechanical Systems",
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    title = "2006 28th Annual International Conference of the IEEE Engineering in Medicine and Biology Society",
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    title = "2006 International Conference on Microtechnologies in Medicine and Biology",
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    chapter = "Polymer-based electrospray chips for mass spectrometry",
    year = "1999",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190320-155059492",
    id = "record",
    isbn = "0-7803-5194-0",
    doi = "10.1109/MEMSYS.1999.746883"
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    title = "Microfabrication of linear translator tuning elements in submillimeter-wave integrated circuits",
    journal = "Journal of Microelectromechanical Systems",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LUBjms98",
    id = "record",
    issn = "1057-7157",
    doi = "10.1109/84.735348",
    volume = "7"
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    title = "Microfabricated Silicon Mixers for Submillisecond Quench-Flow Analysis",
    journal = "Analytical Chemistry",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20110620-160422644",
    id = "record",
    issn = "0003-2700",
    doi = "10.1021/ac9708250",
    volume = "70"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:GROmems98,
    title = "Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems",
    chapter = "Micro Balloon Actuators for Aerodynamic Control",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GROmems98",
    id = "record",
    isbn = "0-7803-4412-X",
    doi = "10.1109/MEMSYS.1998.659748"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:LEEmems98,
    title = "International Workshop on Micro Electro Mechanical Systems,11th (MEMS 98), Heidelberg, Germany, 25-29 January 1998",
    chapter = "A micro cell lysis device",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LEEmems98",
    id = "record",
    isbn = "0-7803-4412-X",
    doi = "10.1109/MEMSYS.1998.659798"
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    title = "Micro-Electro-Mechanical-Systems (MEMS) and Fluid Flows",
    journal = "Annual Review of Fluid Mechanics",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HOCarfm98",
    id = "record",
    issn = "0066-4189",
    doi = "10.1146/annurev.fluid.30.1.579",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:YANmems98,
    title = "International Workshop on Micro Electro Mechanical Systems,11th (MEMS 98), Heidelberg, Germany, 25-29 January 1998",
    chapter = "Micromachined membrane particle filters",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:YANmems98",
    id = "record",
    isbn = "0-7803-4412-X",
    doi = "10.1109/MEMSYS.1998.659743"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:DESmems98,
    title = "International Workshop on Micro Electro Mechanical Systems, 11th (MEMS 98). Heidelberg, Germany, 25-29 January 1998",
    chapter = "A MEMS electrostatic particle transportation system",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:DESmems98",
    id = "record",
    isbn = "0-7803-4412-X",
    doi = "10.1109/MEMSYS.1998.659740"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:WUSmems98,
    title = "International Workshop on  Micro Electro Mechanical Systems, 11th. MEMS 98.",
    chapter = "A suspended microchannel with integrated temperature sensors for high-pressure flow studies",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:WUSmems98",
    id = "record",
    isbn = "0-7803-4412-X",
    doi = "10.1109/MEMSYS.1998.659734"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170525-161134683,
    title = "Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)",
    chapter = "Gas-phase Silicon Etching With Bromine Trifluoride",
    year = "1997",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170525-161134683",
    id = "record",
    isbn = "0-7803-3829-4",
    doi = "10.1109/SENSOR.1997.635751"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190409-143106813,
    title = "Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)",
    chapter = "An integrated MEMS system for turbulent boundary layer control",
    year = "1997",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190409-143106813",
    id = "record",
    isbn = "0780338294",
    doi = "10.1109/sensor.1997.613647"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20110620-160422991,
    title = "Transducers '97: Digest of Technical Papers",
    chapter = "Microfluidic sub-millisecond mixers for the study of chemical reaction kinetics",
    year = "1997",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20110620-160422991",
    id = "record",
    isbn = "0-7803-3829-4",
    doi = "10.1109/SENSOR.1997.613609"
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    title = "Micromachined electromagnetic scanning mirrors",
    journal = "Optical Engineering",
    year = "1997",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20161006-135453747",
    id = "record",
    issn = "0091-3286",
    doi = "10.1117/1.601348",
    volume = "36"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:GWOieeeac97.870,
    title = "IEEE Aerospace Conference Proceedings, 1997",
    chapter = "Macro aerodynamic devices controlled by micro systems",
    year = "1997",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GWOieeeac97.870",
    id = "record",
    isbn = "0-7803-3741-7",
    doi = "10.1109/AERO.1997.574871"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824904,
    title = "Proceedings of 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society",
    chapter = "A cultured neuron probe",
    year = "1996",
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    isbn = "0780338111",
    doi = "10.1109/iembs.1996.646466"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190320-151208784,
    title = "1996 Proceedings. Eighth Annual IEEE International Conference on Innovative Systems in Silicon",
    chapter = "A wafer-scale MEMS and analog VLSI system for active drag reduction",
    year = "1996",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190320-151208784",
    id = "record",
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    doi = "10.1109/iciss.1996.552410"
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    title = "Analog VLSI system for active drag reduction",
    journal = "IEEE Micro",
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    issn = "0272-1732",
    doi = "10.1109/40.540081",
    volume = "16"
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    title = "Improved micro thermal shear-stress sensor",
    journal = "IEEE Transactions on Instrumentation and Measurement",
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    issn = "0018-9456",
    doi = "10.1109/19.492789",
    volume = "45"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964,
    title = "Miniaturized Systems with Micro-Optics and Micromechanics",
    chapter = "Magnetically actuated MEMS scanning mirror",
    year = "1996",
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    isbn = "0819420611",
    doi = "10.1117/12.234635"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824343,
    title = "Proceedings of Ninth International Workshop on Micro Electromechanical Systems",
    chapter = "A surface-micromachined shear stress imager",
    year = "1996",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824343",
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    isbn = "0780329856",
    doi = "10.1109/memsys.1996.493838"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824427,
    title = "Proceedings of Fifth International Conference on Microelectronics for Neural Networks",
    chapter = "Analog VLSI system for active drag reduction",
    year = "1996",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824427",
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    isbn = "0818673737",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120216-102529210,
    title = "1995 IEEE TENCON: IEEE Region 10 International Conference on Microelectronics and VLSI",
    chapter = "A micro silicon hot-wire anemometer",
    year = "1995",
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    id = "record",
    isbn = "0-7803-2624-5",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120224-074428166,
    title = "1995 IEEE TENCON: IEEE Region 10 International Conference on Microelectronics and VLSI",
    chapter = "Micromotors",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120224-074428166",
    id = "record",
    isbn = "0-7803-2624-5",
    doi = "10.1109/TENCON.1995.496322"
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@article{https://resolver.caltech.edu/CaltechAUTHORS:20190320-154545293,
    title = "Silicon micromachined electromagnetic microactuators for rigid disk drives",
    journal = "IEEE Transactions on Magnetics",
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    issn = "0018-9464",
    doi = "10.1109/20.490204",
    volume = "31"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120217-075451649,
    title = "1995 IEEE TENCON: IEEE Region 10 International Conference on Microelectronics and VLSI",
    chapter = "Fluidic shear-stress measurement using surface-micromachined sensors",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120217-075451649",
    id = "record",
    isbn = "0-7803-2624-5",
    doi = "10.1109/TENCON.1995.496324"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190326-073205260,
    title = "Proceedings of IEEE 14th Symposium on Mass Storage Systems",
    chapter = "Silicon microstructures and microactuators for compact computer disk drives",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190326-073205260",
    id = "record",
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    title = "Silicon micromachined SCALED technology",
    journal = "IEEE Transactions on Industrial Electronics",
    year = "1995",
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    id = "record",
    issn = "0278-0046",
    doi = "10.1109/41.382133",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170525-170153415,
    title = "Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95",
    chapter = "A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170525-170153415",
    id = "record",
    isbn = "91-630-3473-5",
    doi = "10.1109/SENSOR.1995.717185"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824998,
    title = "Proceedings of 1995 American Control Conference - ACC'95",
    chapter = "Silicon microstructures and microactuators for compact computer disk drives",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824998",
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    doi = "10.1109/acc.1995.532710"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151825052,
    title = "Proceedings of 1995 IEEE Instrumentation and Measurement Technology Conference - IMTC '95",
    chapter = "Micro thermal shear stress sensor with and without cavity underneath",
    year = "1995",
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    isbn = "0780326156",
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@article{https://resolver.caltech.edu/CaltechAUTHORS:TEMjms95,
    title = "Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives",
    journal = "Journal of Microelectromechanical Systems",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TEMjms95",
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    issn = "1057-7157",
    doi = "10.1109/84.365366",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190409-160247695,
    title = "1995 Proceedings IEEE Micro Electro Mechanical Systems",
    chapter = "Out-of-plane permalloy magnetic actuators for delta-wing control",
    year = "1995",
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    id = "record",
    isbn = "0-7803-2503-6",
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    title = "Silicon microstructures and microactuators for compact computer disk drives",
    journal = "IEEE Control Systems Magazine",
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    doi = "10.1109/37.334415",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190326-111103745,
    title = "Proceedings of 1994 IEEE International Electron Devices Meeting",
    chapter = "Theoretical and experimental studies of micromachined hot-wire anemometers",
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    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190326-111103745",
    id = "record",
    isbn = "0-7803-2111-1",
    doi = "10.1109/IEDM.1994.383445"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824764,
    title = "Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems",
    chapter = "Surface micromachined magnetic actuators",
    year = "1994",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824764",
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    isbn = "0780318331",
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    id = "record",
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    volume = "3"
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    title = "[1993] Proceedings IEEE Micro Electro Mechanical Systems",
    chapter = "In situ monitoring and universal modelling of sacrificial PSG etching using hydrofluoric acid",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824840,
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    doi = "10.1109/iedm.1988.32901"
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120607-142008892,
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    doi = "10.1109/SOLSEN.1988.26440"
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    id = "record",
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    doi = "10.1109/16.2523",
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