@other{https://resolver.caltech.edu/CaltechTHESIS:10072014-112733274, title = "I. Reactively sputtered Ti-Si-N thin films for diffusion barrier applications. II. Oxidation, diffusion and crystallization of an amorphous Zr\_(60)Al\_(15)Ni\_(25) alloy.", url = "https://resolver.caltech.edu/CaltechTHESIS:10072014-112733274", id = "record", doi = "10.7907/849b-sh13" }