@other{https://resolver.caltech.edu/CaltechETD:etd-01172008-101729,
    title = "Spatio-temporal beam synthesis and applications to photolithography",
    url = "https://resolver.caltech.edu/CaltechETD:etd-01172008-101729",
    id = "record",
    doi = "10.7907/ws8q-mt53"
}