@article{https://resolver.caltech.edu/CaltechAUTHORS:20150909-153421019, title = "Depth profiling of implanted neon with resonant nuclear reactions", journal = "Journal of Nuclear Materials", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150909-153421019", id = "record", issn = "0022-3115", doi = "10.1016/0022-3115(78)90505-6", volume = "78" }