<h1>Rieffel, Marc A.</h1> <h2>Monograph from <a href="https://authors.library.caltech.edu">CaltechAUTHORS</a></h2> <ul> <li>Rieffel, Marc A. (1995) <a href="https://resolver.caltech.edu/CaltechCSTR:1995.cs-tr-95-12">Concurrent Simulations of Plasma Reactors for VLSI Manufacturing</a>; <a href="https://doi.org/10.7907/Z92805N5">10.7907/Z92805N5</a></li> </ul>