@other{https://resolver.caltech.edu/CaltechCSTR:1995.cs-tr-95-12,
    title = "Concurrent Simulations of Plasma Reactors for VLSI Manufacturing",
    year = "2001",
    url = "https://resolver.caltech.edu/CaltechCSTR:1995.cs-tr-95-12",
    id = "record",
    doi = "10.7907/Z92805N5"
}