@other{https://resolver.caltech.edu/CaltechETD:etd-10192007-131842,
    title = "Amorphous ternary diffusion barriers for silicon metallizations",
    url = "https://resolver.caltech.edu/CaltechETD:etd-10192007-131842",
    id = "record",
    doi = "10.7907/4TFH-VM05"
}