@other{https://resolver.caltech.edu/CaltechTHESIS:10072014-112733274,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-12192007-083658,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-10192007-131842,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-09172007-133201,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-11302007-084825,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-08172007-080314,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-06282007-105319,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-11062007-081348,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-02012007-110846,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-03242008-133647,
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}


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}


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}


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}


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}


@other{https://resolver.caltech.edu/CaltechETD:etd-09062006-140245,
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}


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}


@other{https://resolver.caltech.edu/CaltechETD:etd-10102006-094500,
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}


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}


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}


@other{https://resolver.caltech.edu/CaltechETD:etd-04122004-132122,
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}


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}


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}


@other{https://resolver.caltech.edu/CaltechTHESIS:10072014-144607202,
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}


@other{https://resolver.caltech.edu/CaltechETD:etd-10082002-102055,
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}