@article{https://authors.library.caltech.edu/records/neqp6-ra055,
    author = "Nicolet, M. A. and Ryser, M. and Romano, V.",
    title = "Electrical resistivity change in amorphous Ta\_42Si\_13N\_45 films by stress relaxation",
    year = "2015",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150120-090507230",
    id = "https://authors.library.caltech.edu/records/neqp6-ra055",
    issn = "0947-8396",
    doi = "10.1007/s00339-014-8931-0",
    volume = "118",
    number = "3",
    pages = "1153-1160"
}


@article{https://authors.library.caltech.edu/records/arn5x-ydr70,
    author = "Romano, V. and Meier, M. and Theodore, N. D. and Marble, D. K. and Nicolet, M.-A.",
    title = "Irradiation of amorphous Ta\_(42)Si\_(13)N\_(45) film with a femtosecond laser pulse",
    year = "2011",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20110706-112823253",
    id = "https://authors.library.caltech.edu/records/arn5x-ydr70",
    issn = "0947-8396",
    doi = "10.1007/s00339-010-6149-3",
    volume = "104",
    number = "1",
    pages = "357-364"
}


@article{https://authors.library.caltech.edu/records/4dmgz-y4h04,
    author = "Nicolet, M.-A. and Giauque, P. H.",
    title = "Highly metastable amorphous or near-amorphous ternary films (mictamict alloys)",
    year = "2001",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170822-160710299",
    id = "https://authors.library.caltech.edu/records/4dmgz-y4h04",
    issn = "0167-9317",
    doi = "10.1016/S0167-9317(00)00468-8",
    volume = "55",
    number = "1-4",
    pages = "357-367"
}


@article{https://authors.library.caltech.edu/records/h6vde-smc78,
    author = "Nicolet, Marc-A.",
    title = "Reactively sputtered ternary films of the type TM–Si–N and their properties (TM=early transition metal)",
    year = "2000",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170816-155358775",
    id = "https://authors.library.caltech.edu/records/h6vde-smc78",
    issn = "0042-207X",
    doi = "10.1016/S0042-207X(00)00338-9",
    volume = "59",
    number = "2-3",
    pages = "716-720"
}


@article{https://authors.library.caltech.edu/records/673r7-tqk74,
    author = "Gasser, S. M. and Kolawa, E. and Nicolet, M.-A.",
    title = "Thermal reaction of Pt film with 110 GaN epilayer",
    year = "1999",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GASjvsta99",
    id = "https://authors.library.caltech.edu/records/673r7-tqk74",
    issn = "0734-2101",
    doi = "10.1116/1.581924",
    volume = "17",
    number = "5",
    pages = "2642-2646"
}


@article{https://authors.library.caltech.edu/records/xm8cb-psc97,
    author = "Gasser, S. M. and Ruiz, R. and Kolawa, E. and Nicolet, M.-A.",
    title = "Instability of Amorphous Ru-Si-O Thin Films under Thermal Oxidation",
    year = "1999",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GASjes99",
    id = "https://authors.library.caltech.edu/records/xm8cb-psc97",
    issn = "0013-4651",
    doi = "10.1149/1.1391802",
    volume = "146",
    number = "4",
    pages = "1546-1548"
}


@article{https://authors.library.caltech.edu/records/11gzr-mct82,
    author = "Kacsich, T. and Kolawa, E. and Fleurial, J. P. and Caillat, T. and Nicolet, M.-A.",
    title = "Films of Ni–7 at\% V, Pd, Pt and Ta–Si–N as diffusion barriers for copper on Bi2Te3",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KACjpd98",
    id = "https://authors.library.caltech.edu/records/11gzr-mct82",
    issn = "0022-3727",
    volume = "31",
    number = "19",
    pages = "2406-2411"
}


@article{https://authors.library.caltech.edu/records/n5m4p-z3w18,
    author = "Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M. A.",
    title = "Surface-micromachined Ta–Si–N beams for use in micromechanics",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GREjmm98",
    id = "https://authors.library.caltech.edu/records/n5m4p-z3w18",
    issn = "0960-1317",
    volume = "8",
    number = "2",
    pages = "88-90"
}


@article{https://authors.library.caltech.edu/records/f6t4h-9mh94,
    author = "Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M.-A.",
    title = "Surface-micromachined Ta-Si-N beams for use in micromechanics",
    year = "1998",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822",
    id = "https://authors.library.caltech.edu/records/f6t4h-9mh94",
    issn = "0960-1317",
    doi = "10.1088/0960-1317/8/2/011",
    volume = "8",
    number = "2",
    pages = "88-90"
}


@article{https://authors.library.caltech.edu/records/thk04-k4p52,
    author = "Im, S. and Song, J. H. and Lie, D. Y. C. and Eisen, F. and Atwater, H. and Nicolet, M.-A.",
    title = "SiGeC alloy layer formation by high-dose C +  implantations into pseudomorphic metastable Ge0.08Si0.92 on Si(100)",
    year = "1997",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:IMSjap97",
    id = "https://authors.library.caltech.edu/records/thk04-k4p52",
    issn = "0021-8979",
    doi = "10.1063/1.364027",
    volume = "81",
    number = "4",
    pages = "1700-1703"
}


@article{https://authors.library.caltech.edu/records/h4zv5-qmy26,
    author = "Sun, X. and Schneider, S. and Geyer, U. and Johnson, W. L. and Nicolet, M-A.",
    title = "Oxidation and crystallization of an amorphous Zr60Al15Ni25 alloy",
    year = "1996",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SUNjmr96",
    id = "https://authors.library.caltech.edu/records/h4zv5-qmy26",
    issn = "0884-2914",
    volume = "11",
    number = "11",
    pages = "2738-2743"
}


@article{https://authors.library.caltech.edu/records/v28vv-fv960,
    author = "Reid, J. S. and Kolawa, E. and Garland, C. M. and Nicolet, M-A. and Cardone, F. and Gupta, D. and Ruiz, R. P.",
    title = "Amorphous (Mo, Ta, or W)–Si–N diffusion barriers for Al metallizations",
    year = "1996",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:REIjap96",
    id = "https://authors.library.caltech.edu/records/v28vv-fv960",
    issn = "0021-8979",
    doi = "10.1063/1.360909",
    volume = "79",
    number = "2",
    pages = "1109-1117"
}


@article{https://authors.library.caltech.edu/records/bh18q-7tz39,
    author = "Dauksher, W. J. and Resnick, D. J. and Cummings, K. D. and Baker, J. and Gregory, R. B. and Theodore, N. D. and Chan, J. A. and Johnson, W. A. and Mogab, C. J. and Nicolet, M-A. and Reid, J. S.",
    title = "Method for fabricating a low stress x-ray mask using annealable amorphous refractory compounds",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120216-095821404",
    id = "https://authors.library.caltech.edu/records/bh18q-7tz39",
    issn = "1071-1023",
    doi = "10.1116/1.588331",
    volume = "13",
    number = "6",
    pages = "3103-3108"
}


@article{https://authors.library.caltech.edu/records/01baf-s9v65,
    author = "McLane, G. F. and Casas, L. and Reid, J. S. and Kolawa, E. and Nicolet, M.-A.",
    title = "Reactive ion etching of Ta–Si–N diffusion barriers in CF\_(4)+O\_(2)",
    year = "1994",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120306-151931971",
    id = "https://authors.library.caltech.edu/records/01baf-s9v65",
    issn = "1071-1023",
    doi = "10.1116/1.587763",
    volume = "12",
    number = "4",
    pages = "2352-2355"
}


@article{https://authors.library.caltech.edu/records/3paay-g9525,
    author = "Lie, D. Y. C. and Vantomme, A. and Eisen, F. and Vreeland, T., Jr. and Nicolet, M.-A. and Carns, T. K. and Arbet-Engels, V. and Wang, K. L.",
    title = "Damage and strain in epitaxial GexSi1–x films irradiated with Si",
    year = "1993",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIEjap93",
    id = "https://authors.library.caltech.edu/records/3paay-g9525",
    issn = "0021-8979",
    doi = "10.1063/1.355219",
    volume = "74",
    number = "10",
    pages = "6039-6045"
}


@article{https://authors.library.caltech.edu/records/dwzka-f8r10,
    author = "Liu, W. S. and Chen, J. S. and Nicolet, M-A. and Arbet-Engels, V. and Wang, K. L.",
    title = "Instability of a GexSi1−xO2 film on a GexSi1−x layer",
    year = "1992",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIUjap92c",
    id = "https://authors.library.caltech.edu/records/dwzka-f8r10",
    issn = "0021-8979",
    doi = "10.1063/1.352211",
    volume = "72",
    number = "9",
    pages = "4444-4446"
}


@article{https://authors.library.caltech.edu/records/dq2we-ygs94,
    author = "Workman, T. W. and Nicolet, M-A.",
    title = "D(d,p)T fusion induced by heavy-ion irradiation of TiD1.7",
    year = "1992",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:WORprb92",
    id = "https://authors.library.caltech.edu/records/dq2we-ygs94",
    issn = "0163-1829",
    doi = "10.1103/PhysRevB.46.8589",
    volume = "46",
    number = "13",
    pages = "8589-8592"
}


@article{https://authors.library.caltech.edu/records/8y1pc-yxm34,
    author = "Bai, G. and Nicolet, M.-A.",
    title = "Generation and recovery of strain in (28)Si-implanted pseudomorphic GeSi films on Si(100)",
    year = "1992",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIjap92b",
    id = "https://authors.library.caltech.edu/records/8y1pc-yxm34",
    issn = "0021-8979",
    doi = "10.1063/1.350802",
    volume = "71",
    number = "9",
    pages = "4227-4229"
}


@article{https://authors.library.caltech.edu/records/4cd7q-vkx62,
    author = "Liu, W. S. and Lee, E. W. and Nicolet, M-A. and Arbet-Engels, V. and Wang, K. L. and Abuhadba, N. M. and Aita, C. R.",
    title = "Wet oxidation of GeSi at (700)C",
    year = "1992",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIUjap92b",
    id = "https://authors.library.caltech.edu/records/4cd7q-vkx62",
    issn = "0021-8979",
    doi = "10.1063/1.350847",
    volume = "71",
    number = "8",
    pages = "4015-4018"
}


@article{https://authors.library.caltech.edu/records/022zn-15913,
    author = "Liu, W. S. and Lee, E. W. and Nicolet, M-A. and Arbet-Engels, V. and Wang, K. L.",
    title = "Importance of sample preheating in oxidation of GexSi1−x",
    year = "1992",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIUjap92a",
    id = "https://authors.library.caltech.edu/records/022zn-15913",
    issn = "0021-8979",
    doi = "10.1063/1.350922",
    volume = "71",
    number = "7",
    pages = "3626-3627"
}


@article{https://authors.library.caltech.edu/records/dq6cx-hgd60,
    author = "Bai, G. and Nicolet, M.-A.",
    title = "Damage production and annealing in 28Si-implanted CoSi2/Sim(111) heterostructures",
    year = "1992",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIjap92a",
    id = "https://authors.library.caltech.edu/records/dq6cx-hgd60",
    issn = "0021-8979",
    doi = "10.1063/1.351325",
    volume = "71",
    number = "2",
    pages = "670-675"
}


@article{https://authors.library.caltech.edu/records/xdahv-73d04,
    author = "Bai, G. and Nicolet, M.-A.",
    title = "Defect production in Si(100) by 19F, 28Si, 40Ar, and 131Xe implantation at room temperature",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIjap91c",
    id = "https://authors.library.caltech.edu/records/xdahv-73d04",
    issn = "0021-8979",
    doi = "10.1063/1.349251",
    volume = "70",
    number = "7",
    pages = "3551-3555"
}


@article{https://authors.library.caltech.edu/records/qamh5-0mj14,
    author = "Chen, J. S. and Kolawa, E. and Garland, C. M. and Nicolet, M-A.",
    title = "Epitaxial growth of GaAs by solid-phase transport",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CHEapl91",
    id = "https://authors.library.caltech.edu/records/qamh5-0mj14",
    issn = "0003-6951",
    doi = "10.1063/1.106267",
    volume = "59",
    number = "13",
    pages = "1597-1599"
}


@article{https://authors.library.caltech.edu/records/0barh-vav57,
    author = "Pokela, P. J. and Reid, J. S. and Kwok, C.-K. and Kolawa, E. and Nicolet, M.-A.",
    title = "Thermal oxidation of amorphous ternary Ta36Si14N50 thin films",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:POKjap91",
    id = "https://authors.library.caltech.edu/records/0barh-vav57",
    issn = "0021-8979",
    doi = "10.1063/1.349345",
    volume = "70",
    number = "5",
    pages = "2828-2832"
}


@article{https://authors.library.caltech.edu/records/a2se5-eyq31,
    author = "Kolawa, E. and Chen, J. S. and Reid, J. S. and Pokela, P. J. and Nicolet, M.-A.",
    title = "Tantalum-based diffusion barriers in Si/Cu VLSI metallizations",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KOLjap91",
    id = "https://authors.library.caltech.edu/records/a2se5-eyq31",
    issn = "0021-8979",
    doi = "10.1063/1.349594",
    volume = "70",
    number = "3",
    pages = "1369-1373"
}


@article{https://authors.library.caltech.edu/records/4fzx0-x8b88,
    author = "Bai, G. and Nicolet, M.-A.",
    title = "Defects production and annealing in self-implanted Si",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIjap91b",
    id = "https://authors.library.caltech.edu/records/4fzx0-x8b88",
    issn = "0021-8979",
    doi = "10.1063/1.349668",
    volume = "70",
    number = "2",
    pages = "649-655"
}


@article{https://authors.library.caltech.edu/records/9348x-8gx80,
    author = "Bai, G. and Nicolet, M.-A. and Vreeland, T., Jr.",
    title = "Elastic and thermal properties of mesotaxial CoSi2 layers on Si",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIjap91a",
    id = "https://authors.library.caltech.edu/records/9348x-8gx80",
    issn = "0021-8979",
    volume = "69",
    number = "9",
    pages = "6451-6455"
}


@article{https://authors.library.caltech.edu/records/0sypy-w5v41,
    author = "Tsai, C. J. and Dommann, A. and Nicolet, M. A. and Vreeland, T., Jr.",
    title = "Self-consistent determination of the perpendicular strain profile of implanted Si by analysis of x-ray rocking curves",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TSAjap91",
    id = "https://authors.library.caltech.edu/records/0sypy-w5v41",
    issn = "0021-8979",
    doi = "10.1063/1.348733",
    volume = "69",
    number = "4",
    pages = "2076-2079"
}


@article{https://authors.library.caltech.edu/records/v9s85-1gn68,
    author = "Morishita, K. and Molarius, J. M. and Kolawa, E. and Döbeli, M. and Tombrello, T. and Nicolet, M-A.",
    title = "Arsenic loss during palladium reaction with bulk and thin film gallium arsenide",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20141103-145239247",
    id = "https://authors.library.caltech.edu/records/v9s85-1gn68",
    issn = "0040-6090",
    doi = "10.1016/0040-6090(91)90176-X",
    volume = "196",
    number = "1",
    pages = "85-93"
}


@article{https://authors.library.caltech.edu/records/tjyr6-wcm94,
    author = "Mahan, John E. and Geib, Kent M. and Robinson, G. Y. and Bai, G. and Nicolet, M-A.",
    title = "Reflection high-energy electron diffraction patterns of CrSi\_2 films on (111) silicon",
    year = "1991",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120509-133504606",
    id = "https://authors.library.caltech.edu/records/tjyr6-wcm94",
    issn = "1071-1023",
    doi = "10.1116/1.585791",
    volume = "9",
    number = "1",
    pages = "64-68"
}


@article{https://authors.library.caltech.edu/records/19066-sf465,
    author = "Vu, Quat T. and Pokela, P. J. and Garden, C. L. and Kolawa, E. and Raud, S. and Nicolet, M. A.",
    title = "Thermal oxidation of reactively sputtered amorphous W\_(80)N\_(20) films",
    year = "1990",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120509-153900631",
    id = "https://authors.library.caltech.edu/records/19066-sf465",
    issn = "0021-8979",
    doi = "10.1063/1.346863",
    volume = "68",
    number = "12",
    pages = "6420-6423"
}


@article{https://authors.library.caltech.edu/records/n5jez-kex33,
    author = "Bai, G. and Nicolet, M-A. and Mahan, John E. and Geib, Kent M. and Robinson, Gary Y.",
    title = "Radiation damage in ReSi2 by a MeV 4He beam",
    year = "1990",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIapl90",
    id = "https://authors.library.caltech.edu/records/n5jez-kex33",
    issn = "0003-6951",
    doi = "10.1063/1.104134",
    volume = "57",
    number = "16",
    pages = "1657-1659"
}


@article{https://authors.library.caltech.edu/records/n7ma7-9gy48,
    author = "Molarius, J. M. and Morishita, K. and Kolawa, E. and Nicolet, M.-A.",
    title = "Encapsulation of GaAs and GaAs-Pd in furnace annealing",
    year = "1990",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170830-064908540",
    id = "https://authors.library.caltech.edu/records/n7ma7-9gy48",
    issn = "0042-207X",
    doi = "10.1016/0042-207X(90)93852-A",
    volume = "41",
    number = "4-6",
    pages = "1029-1032"
}


@article{https://authors.library.caltech.edu/records/4pex3-vr798,
    author = "Bai, G. and Nicolet, M.-A. and Mahan, John E. and Geib, Kent M.",
    title = "Channeling of MeV ions in polyatomic epitaxial films: ReSi2 on Si(100)",
    year = "1990",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIprb90",
    id = "https://authors.library.caltech.edu/records/4pex3-vr798",
    issn = "0163-1829",
    doi = "10.1103/PhysRevB.41.8603",
    volume = "41",
    number = "13",
    pages = "8603-8607"
}


@article{https://authors.library.caltech.edu/records/4r6sz-e0m84,
    author = "Kolawa, E. and Molarius, J. M. and Nieh, C. W. and Nicolet, M.-A.",
    title = "Amorphous Ta–Si–N thin‐film alloys as diffusion barrier in Al/Si metallizations",
    year = "1990",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120508-142551386",
    id = "https://authors.library.caltech.edu/records/4r6sz-e0m84",
    issn = "0734-2101",
    doi = "10.1116/1.576620",
    volume = "8",
    number = "3",
    pages = "3006-3010"
}


@article{https://authors.library.caltech.edu/records/q8ykc-67s93,
    author = "Bai, Gang and Nicolet, Marc-A. and Vreeland, Thad, Jr. and Ye, Q. and Wang, K. L.",
    title = "Strain in epitaxial CoSi2 films on Si (111) and inference for pseudomorphic growth",
    year = "1989",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAIapl89",
    id = "https://authors.library.caltech.edu/records/q8ykc-67s93",
    issn = "0003-6951",
    doi = "10.1063/1.102327",
    volume = "55",
    number = "18",
    pages = "1874-1876"
}


@article{https://authors.library.caltech.edu/records/gk8vv-79192,
    author = "Ma, E. and Nicolet, M-A. and Nathan, M.",
    title = "NiAl3 formation in Al/Ni thin-film bilayers with and without contamination",
    year = "1989",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:MAEjap89",
    id = "https://authors.library.caltech.edu/records/gk8vv-79192",
    issn = "0021-8979",
    doi = "10.1063/1.342756",
    volume = "65",
    number = "7",
    pages = "2703-2710"
}


@article{https://authors.library.caltech.edu/records/8rxnd-c9j84,
    author = "Thuillard, M. and Tran, L. T. and Nieh, C. W. and Nicolet, M-A.",
    title = "Thermal reaction of Al/Ti bilayers with contaminated interface",
    year = "1989",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120530-151638572",
    id = "https://authors.library.caltech.edu/records/8rxnd-c9j84",
    issn = "0021-8979",
    doi = "10.1063/1.342780",
    volume = "65",
    number = "6",
    pages = "2553-2556"
}


@article{https://authors.library.caltech.edu/records/ddzdk-ngs55,
    author = "Ma, E. and Workman, T. W. and Johnson, W. L. and Nicolet, M-A.",
    title = "Ion mixing of metal/Al bilayers near 77 K",
    year = "1989",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:MAEapl89",
    id = "https://authors.library.caltech.edu/records/ddzdk-ngs55",
    issn = "0003-6951",
    doi = "10.1063/1.100937",
    volume = "54",
    number = "5",
    pages = "413-415"
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@article{https://authors.library.caltech.edu/records/6276d-mdp60,
    author = "Tandon, J. L. and Madok, J. H. and Leybovich, I. S. and Bai, G. and Nicolet, M-A.",
    title = "Sequential nature of damage annealing and activation in implanted GaAs",
    year = "1989",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TANapl89.965",
    id = "https://authors.library.caltech.edu/records/6276d-mdp60",
    issn = "0003-6951",
    doi = "10.1063/1.100948",
    volume = "54",
    number = "5",
    pages = "448-450"
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@article{https://authors.library.caltech.edu/records/eq5ya-k4y96,
    author = "Kolawa, E. and Garland, C. and Tran, L. and Nieh, C. W. and Molarius, J. M. and Flick, W. and Nicolet, M.-A. and Wei, J.",
    title = "Indium oxide diffusion barriers for Al/Si metallizations",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KOLapl88",
    id = "https://authors.library.caltech.edu/records/eq5ya-k4y96",
    issn = "0003-6951",
    doi = "10.1063/1.100541",
    volume = "53",
    number = "26",
    pages = "2644-2646"
}


@article{https://authors.library.caltech.edu/records/z48b5-tx930,
    author = "Ma, W. and Meng, W. J. and Johnson, W. L. and Nicolet, M-A. and Nathan, M.",
    title = "Simultaneous planar growth of amorphous and crystalline Ni silicides",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:MAEapl88",
    id = "https://authors.library.caltech.edu/records/z48b5-tx930",
    issn = "0003-6951",
    doi = "10.1063/1.100494",
    volume = "53",
    number = "21",
    pages = "2033-2035"
}


@article{https://authors.library.caltech.edu/records/b63mt-73p23,
    author = "So, F. C. T. and Kolawa, E. and Zhao, X.-A. and Pan, E. T.-S. and Nicolet, M.-A.",
    title = "WxN1–x alloys as diffusion barriers between Al and Si",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SOFjap88",
    id = "https://authors.library.caltech.edu/records/b63mt-73p23",
    issn = "0021-8979",
    doi = "10.1063/1.341579",
    volume = "64",
    number = "5",
    pages = "2787-2789"
}


@article{https://authors.library.caltech.edu/records/aaqt6-f5h60,
    author = "Zhao, X.-A. and So, F. C. T. and Nicolet, M-A.",
    title = "TiAl3 formation by furnace annealing of Ti/Al bilayers and the effect of impurities",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ZHAjap88",
    id = "https://authors.library.caltech.edu/records/aaqt6-f5h60",
    issn = "0021-8979",
    doi = "10.1063/1.340981",
    volume = "63",
    number = "8",
    pages = "2600-2607"
}


@article{https://authors.library.caltech.edu/records/w2b5c-vmj47,
    author = "Ma, E. and Kim, S.-J. and Nicolet, M.-A. and Averback, R. S.",
    title = "Ion mixing and thermochemical properties of tracers in Ag",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:MAEjap88",
    id = "https://authors.library.caltech.edu/records/w2b5c-vmj47",
    issn = "0021-8979",
    doi = "10.1063/1.341018",
    volume = "63",
    number = "7",
    pages = "2449-2451"
}


@article{https://authors.library.caltech.edu/records/q8c92-dbt44,
    author = "Kim, S.-J. and Nicolet, M-A. and Averback, R. S. and Peak, D.",
    title = "Low-temperature ion-beam mixing in metals",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KIMprb88",
    id = "https://authors.library.caltech.edu/records/q8c92-dbt44",
    issn = "0163-1829",
    doi = "10.1103/PhysRevB.37.38",
    volume = "37",
    number = "1",
    pages = "38-49"
}


@article{https://authors.library.caltech.edu/records/4d451-yp883,
    author = "Lim, B. S. and Ma, E. and Nicolet, M-A. and Nathan, M.",
    title = "Silicon resistor to measure temperature during rapid thermal annealing",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIMrsi88",
    id = "https://authors.library.caltech.edu/records/4d451-yp883",
    issn = "0034-6748",
    doi = "10.1063/1.1140004",
    volume = "59",
    number = "1",
    pages = "182-183"
}


@article{https://authors.library.caltech.edu/records/ahs76-ft181,
    author = "So, F. C. T. and Kolawa, E. and Zhao, X.-A. and Pan, E. T-S. and Nicolet, M.-A.",
    title = "Summary Abstract: Reactively sputtered RuO2 and Mo–O diffusion barriers",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SOFjvstb87",
    id = "https://authors.library.caltech.edu/records/ahs76-ft181",
    issn = "1071-1023",
    doi = "10.1116/1.583631",
    volume = "5",
    number = "6",
    pages = "1748-1749"
}


@article{https://authors.library.caltech.edu/records/j3w3s-5zr38,
    author = "Zhao, X.-A. and Yang, H.-Y. and Nicolet, M-A.",
    title = "Kinetics of NiAl3 growth induced by steady-state thermal annealing at the Ni-<Al> interface",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ZHAjap87",
    id = "https://authors.library.caltech.edu/records/j3w3s-5zr38",
    issn = "0021-8979",
    doi = "10.1063/1.339563",
    volume = "62",
    number = "5",
    pages = "1821-1825"
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@article{https://authors.library.caltech.edu/records/xbab5-b8q98,
    author = "Lim, B. S. and Ma, E. and Nicolet, M-A. and Natan, M.",
    title = "Kinetics and moving species during Co2Si formation by rapid thermal annealing",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIMjap87",
    id = "https://authors.library.caltech.edu/records/xbab5-b8q98",
    issn = "0021-8979",
    doi = "10.1063/1.338324",
    volume = "61",
    number = "11",
    pages = "5027-5030"
}


@article{https://authors.library.caltech.edu/records/9f9b0-p5736,
    author = "Workman, T. W. and Cheng, Y. T. and Johnson, W. L. and Nicolet, M.-A.",
    title = "Effect of thermodynamics on ion mixing",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:WORapl87",
    id = "https://authors.library.caltech.edu/records/9f9b0-p5736",
    issn = "0003-6951",
    doi = "10.1063/1.98253",
    volume = "50",
    number = "21",
    pages = "1485-1487"
}


@article{https://authors.library.caltech.edu/records/532q1-add09,
    author = "Cheng, Y.-T. and Nicolet, M.-A. and Johnson, W. L.",
    title = "From cascade to spike — a fractal-geometry approach",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CHEprl87",
    id = "https://authors.library.caltech.edu/records/532q1-add09",
    issn = "0031-9007",
    doi = "10.1103/PhysRevLett.58.2083",
    volume = "58",
    number = "20",
    pages = "2083-2086"
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@article{https://authors.library.caltech.edu/records/a3fan-v0002,
    author = "Kao, Y. C. and Wang, K. L. and de Fresart, E. and Hull, R. and Bai, G. and Jamieson, D. and Nicolet, M-A.",
    title = "Study of CoSi2/Si strained layers grown by molecular beam epitaxy",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KAOjvstb87",
    id = "https://authors.library.caltech.edu/records/a3fan-v0002",
    issn = "1071-1023",
    doi = "10.1116/1.583781",
    volume = "5",
    number = "3",
    pages = "745-748"
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@article{https://authors.library.caltech.edu/records/6g3jk-mez90,
    author = "Kolawa, E. and So, F. C. T. and Pan, E. T-S. and Nicolet, M.-A.",
    title = "Reactively sputtered RuO2 diffusion barriers",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KOLapl87",
    id = "https://authors.library.caltech.edu/records/6g3jk-mez90",
    issn = "0003-6951",
    doi = "10.1063/1.98012",
    volume = "50",
    number = "13",
    pages = "854-855"
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@article{https://authors.library.caltech.edu/records/yntd4-end62,
    author = "Banwell, T. and Nicolet, M-A. and Sands, T. and Grunthaner, P. J.",
    title = "Chemical effects in ion mixing of a ternary system (metal-SiO\_2)",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120622-075340401",
    id = "https://authors.library.caltech.edu/records/yntd4-end62",
    issn = "0003-6951",
    doi = "10.1063/1.98138",
    volume = "50",
    number = "10",
    pages = "571-573"
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@article{https://authors.library.caltech.edu/records/5s9bx-jpp33,
    author = "Banwell, Thomas and Nicolet, M.-A.",
    title = "Distinguishing anisotropic from isotropic transport in ion mixing of metal/oxide bilayers",
    year = "1987",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170816-144413444",
    id = "https://authors.library.caltech.edu/records/5s9bx-jpp33",
    issn = "0168-583X",
    doi = "10.1016/S0168-583X(87)80141-6",
    volume = "19-20",
    pages = "704-707"
}


@article{https://authors.library.caltech.edu/records/q88z3-8nj37,
    author = "Zhao, X.-A. and Kolawa, E. and Nicolet, M-A.",
    title = "Reaction of thin metal films with crystalline and amorphous Al2O3",
    year = "1986",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ZHAjvsta86",
    id = "https://authors.library.caltech.edu/records/q88z3-8nj37",
    issn = "0734-2101",
    doi = "10.1116/1.573642",
    volume = "4",
    number = "6",
    pages = "3139-3141"
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@article{https://authors.library.caltech.edu/records/4q72q-fqf47,
    author = "So, F. C. T. and Kolawa, E. and Kattelus, H. P. and Zhao, X.-A. and Nicolet, M.-A. and Lien, C.-D.",
    title = "Thermal stability and nitrogen redistribution in the <Si>/Ti/W-N/ AI metallization scheme",
    year = "1986",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120627-125934625",
    id = "https://authors.library.caltech.edu/records/4q72q-fqf47",
    issn = "0734-2101",
    doi = "10.1116/1.573631",
    volume = "4",
    number = "6",
    pages = "3078-3081"
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@article{https://authors.library.caltech.edu/records/js5he-j6w68,
    author = "So, F. C. T. and Kolawa, E. and Kattelus, H. P. and Zhao, X. -A. and Nicolet, M.-A. and Lien, C.-D.",
    title = "Thermal stability and nitrogen redistribution in the〈Si〉/Ti/W–N/Al metallization scheme",
    year = "1986",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120626-155811980",
    id = "https://authors.library.caltech.edu/records/js5he-j6w68",
    issn = "0734-2101",
    doi = "10.1116/1.573631",
    volume = "4",
    number = "6",
    pages = "3078-3081"
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@article{https://authors.library.caltech.edu/records/dz6d2-nc477,
    author = "Cheng, Y.-T. and Zhao, X.-A. and Banwell, T. and Workman, T. W. and Nicolet, M-A. and Johnson, W. L.",
    title = "Correlation between the cohesive energy and the onset of radiation-enhanced diffusion in ion mixing",
    year = "1986",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CHEjap86",
    id = "https://authors.library.caltech.edu/records/dz6d2-nc477",
    issn = "0021-8979",
    doi = "10.1063/1.337131",
    volume = "60",
    number = "7",
    pages = "2615-2617"
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@article{https://authors.library.caltech.edu/records/xze9e-v7408,
    author = "Kattelus, H. P. and Tandon, J. L. and Sala, C. and Nicolet, M.-A.",
    title = "Bias-induced stress transitions in sputtered TiN films",
    year = "1986",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KATjvsta86",
    id = "https://authors.library.caltech.edu/records/xze9e-v7408",
    issn = "0734-2101",
    doi = "10.1116/1.573776",
    volume = "4",
    number = "4",
    pages = "1850-1854"
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@article{https://authors.library.caltech.edu/records/b5g2r-jdv84,
    author = "Banwell, Thomas and Nicolet, M.-A. and Averback, R. S. and Thompson, L. J.",
    title = "Effect of dose rate on ion beam mixing in Nb-Si",
    year = "1986",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120626-145123709",
    id = "https://authors.library.caltech.edu/records/b5g2r-jdv84",
    issn = "0003-6951",
    doi = "10.1063/1.96854",
    volume = "48",
    number = "22",
    pages = "1519-1521"
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@article{https://authors.library.caltech.edu/records/3qt19-hp080,
    author = "Banwell, T. C. and Zhao, X.-A. and Nicolet, M.-A.",
    title = "Effects of ion irradiation on conductivity of CrSi\_2 thin films",
    year = "1986",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120626-152109958",
    id = "https://authors.library.caltech.edu/records/3qt19-hp080",
    issn = "0021-8979",
    doi = "10.1063/1.336931",
    volume = "59",
    number = "9",
    pages = "3077-3080"
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@article{https://authors.library.caltech.edu/records/r6aqm-4cb62,
    author = "So, F. C. T. and Lien, C.-D. and Nicolet, M. -A.",
    title = "Formation and electrical properties of Hf Si\_2 grown thermally from evaporated Hf and Si films",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120628-154831998",
    id = "https://authors.library.caltech.edu/records/r6aqm-4cb62",
    issn = "0734-2101",
    doi = "10.1116/1.572909",
    volume = "3",
    number = "6",
    pages = "2284-2288"
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@article{https://authors.library.caltech.edu/records/r0r0t-v4c69,
    author = "Kattelus, H. P. and Kolawa, E. and Affolter, K. and Nicolet, M.-A.",
    title = "Sputtered W–N diffusion barriers",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KATjvsta85",
    id = "https://authors.library.caltech.edu/records/r0r0t-v4c69",
    issn = "0734-2101",
    doi = "10.1116/1.572901",
    volume = "3",
    number = "6",
    pages = "2246-2254"
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@article{https://authors.library.caltech.edu/records/bfsbk-q7e73,
    author = "Cheng, Y.-T. and Johnson, W. L. and Nicolet, M-A.",
    title = "Dominant moving species in the formation of amorphous NiZr by solid-state reaction",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CHEapl85a",
    id = "https://authors.library.caltech.edu/records/bfsbk-q7e73",
    issn = "0003-6951",
    doi = "10.1063/1.95988",
    volume = "47",
    number = "6",
    pages = "800-802"
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@article{https://authors.library.caltech.edu/records/00k4n-bcq17,
    author = "Affolter, K. and Zhao, X.-A. and Nicolet, M.-A.",
    title = "Transition-metal silicides formed by ion mixing and by thermal annealing: Which species moves?",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:AFFjap85",
    id = "https://authors.library.caltech.edu/records/00k4n-bcq17",
    issn = "0021-8979",
    doi = "10.1063/1.335809",
    volume = "58",
    number = "8",
    pages = "3087-3083"
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@article{https://authors.library.caltech.edu/records/qsh58-kr331,
    author = "Van Rossum, M. and Cheng, Y-T. and Nicolet, M-A. and Johnson, W. L.",
    title = "Correlation between cohesive energy and mixing rate in ion mixing of metallic bilayers",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ROSapl85",
    id = "https://authors.library.caltech.edu/records/qsh58-kr331",
    issn = "0003-6951",
    doi = "10.1063/1.95557",
    volume = "46",
    number = "6",
    pages = "610-612"
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@article{https://authors.library.caltech.edu/records/bmjth-xc367,
    author = "Hamdi, A. H. and Speriosu, V. S. and Nicolet, M-A. and Tandon, J. L. and Yeh, Y. C. M.",
    title = "Analyses of metalorganic chemical-vapor-deposition-grown AlxGa1−xAs/GaAs strained superlattice structures by backscattering spectrometry and x-ray rocking curves",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HAMjap85",
    id = "https://authors.library.caltech.edu/records/bmjth-xc367",
    issn = "0021-8979",
    doi = "10.1063/1.334496",
    volume = "57",
    number = "4",
    pages = "1400-1402"
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@article{https://authors.library.caltech.edu/records/ch18a-1xe08,
    author = "Hamdi, A. H. and Speriosu, V. S. and Tandon, J. L. and Nicolet, M-A.",
    title = "Combined use of ion backscattering and x-ray rocking curves in the analyses of superlattices",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HAMprb85",
    id = "https://authors.library.caltech.edu/records/ch18a-1xe08",
    issn = "0163-1829",
    doi = "10.1103/PhysRevB.31.2343",
    volume = "31",
    number = "4",
    pages = "2343-2347"
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@article{https://authors.library.caltech.edu/records/gahed-dg329,
    author = "Speriosu, V. S. and Nicolet, M.-A. and Tandon, J. L. and Yeh, Y. C. M.",
    title = "Interfacial strain in AlxGa1–xAs layers on GaAs",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SPEjap85",
    id = "https://authors.library.caltech.edu/records/gahed-dg329",
    issn = "0021-8979",
    doi = "10.1063/1.334490",
    volume = "57",
    number = "4",
    pages = "1377-1379"
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@article{https://authors.library.caltech.edu/records/tx3yk-30237,
    author = "Pan, C. K. and Zheng, D. C. and Finstad, T. G. and Chu, W. K. and Speriosu, V. S. and Nicolet, M-A. and Barrett, J. H.",
    title = "Structural study of GaSb/AlSb strained-layer superlattice",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:PANprb85",
    id = "https://authors.library.caltech.edu/records/tx3yk-30237",
    issn = "0163-1829",
    doi = "10.1103/PhysRevB.31.1270",
    volume = "31",
    number = "3",
    pages = "1270-1277"
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@article{https://authors.library.caltech.edu/records/96602-p2e27,
    author = "Lien, C.-D. and Nicolet, M.-A. and Pai, C. S.",
    title = "A structure marker study for Pd\_2Si formation: Pd moves in epitaxial Pd\_2Si",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120628-081537763",
    id = "https://authors.library.caltech.edu/records/96602-p2e27",
    issn = "0021-8979",
    doi = "10.1063/1.334792",
    volume = "57",
    number = "2",
    pages = "224-226"
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@article{https://authors.library.caltech.edu/records/f04z1-vah63,
    author = "Ho, K. T. and Lien, C.-D. and Shreter, U. and Nicolet, M-A.",
    title = "An inert marker study for palladium silicide formation: Si moves in polycrystalline Pd2Si",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HOKjap85b",
    id = "https://authors.library.caltech.edu/records/f04z1-vah63",
    issn = "0021-8979",
    doi = "10.1063/1.334793",
    volume = "57",
    number = "2",
    pages = "227-231"
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@article{https://authors.library.caltech.edu/records/3waw1-89k56,
    author = "Kim, Sung-Joon and Nicolet, M-A. and Averback, R. S. and Baldo, P.",
    title = "Low-temperature ion beam mixing of Pt and Si markers in Ge",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KIMapl85",
    id = "https://authors.library.caltech.edu/records/3waw1-89k56",
    issn = "0003-6951",
    doi = "10.1063/1.95719",
    volume = "46",
    number = "2",
    pages = "154-156"
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@article{https://authors.library.caltech.edu/records/wardr-hbs69,
    author = "Ho, K. T. and Lien, C. D. and Nicolet, M-A.",
    title = "Palladium silicide formation under the influence of nitrogen and oxygen impurities",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HOKjap85a",
    id = "https://authors.library.caltech.edu/records/wardr-hbs69",
    issn = "0021-8979",
    doi = "10.1063/1.334794",
    volume = "57",
    number = "2",
    pages = "232-236"
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@article{https://authors.library.caltech.edu/records/thn58-49g24,
    author = "Zur, A. and McGill, T. C. and Nicolet, M.-A.",
    title = "Transition-metal silicides lattice-matched to silicon",
    year = "1985",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ZURjap85",
    id = "https://authors.library.caltech.edu/records/thn58-49g24",
    issn = "0021-8979",
    doi = "10.1063/1.334743",
    volume = "57",
    number = "2",
    pages = "600-603"
}


@article{https://authors.library.caltech.edu/records/5a4ac-jz760,
    author = "Zhu, M. F. and Suni, I. and Nicolet, M.-A. and Sands, T.",
    title = "Reaction of amorphous Ni-W and Ni-N-W films with substrate silicon",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ZHUjap84",
    id = "https://authors.library.caltech.edu/records/5a4ac-jz760",
    issn = "0021-8979",
    doi = "10.1063/1.333804",
    volume = "56",
    number = "10",
    pages = "2740-2745"
}


@article{https://authors.library.caltech.edu/records/p73nq-wa076,
    author = "Lien, C.-D. and So, F. C. T. and Nicolet, M.-A.",
    title = "An improved forward I-V method for nonideal Schottky diodes with high series resistance",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170726-143803541",
    id = "https://authors.library.caltech.edu/records/p73nq-wa076",
    issn = "0018-9383",
    doi = "10.1109/T-ED.1984.21739",
    volume = "31",
    number = "10",
    pages = "1502-1503"
}


@article{https://authors.library.caltech.edu/records/rpd8p-grz83,
    author = "Lien, C. D. and Nicolet, M-A.",
    title = "Impurity effects in transition metal silicides",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIEjvstb84",
    id = "https://authors.library.caltech.edu/records/rpd8p-grz83",
    issn = "1071-1023",
    doi = "10.1116/1.582872",
    volume = "2",
    number = "4",
    pages = "738-747"
}


@article{https://authors.library.caltech.edu/records/mgd09-rkc04,
    author = "Van Rossum, M. and Nicolet, M-A. and Wilts, C. H.",
    title = "Magnetic properties of amorphous thin films produced by ion mixing",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ROSjap84",
    id = "https://authors.library.caltech.edu/records/mgd09-rkc04",
    issn = "0021-8979",
    doi = "10.1063/1.334096",
    volume = "56",
    number = "4",
    pages = "1032-1035"
}


@article{https://authors.library.caltech.edu/records/ds04n-94z89,
    author = "Ho, K. T. and Suni, I. and Nicolet, M-A.",
    title = "Substrate orientation dependence of enhanced epitaxial regrowth of silicon",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HOKjap84",
    id = "https://authors.library.caltech.edu/records/ds04n-94z89",
    issn = "0021-8979",
    doi = "10.1063/1.334050",
    volume = "56",
    number = "4",
    pages = "1207-1212"
}


@article{https://authors.library.caltech.edu/records/4x74v-ygk94,
    author = "Speriosu, V. S. and Nicolet, M.-A. and Picraux, S. T. and Biefeld, R. M.",
    title = "Depth profiles of perpendicular and parallel strain in a GaAsxP1−x/GaP superlattice",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SPEapl84",
    id = "https://authors.library.caltech.edu/records/4x74v-ygk94",
    issn = "0003-6951",
    doi = "10.1063/1.95190",
    volume = "45",
    number = "3",
    pages = "223-225"
}


@article{https://authors.library.caltech.edu/records/7rehq-rh243,
    author = "Suni, I. and Shreter, U. and Nicolet, M-A. and Baker, J. E.",
    title = "Influence of F and Cl on the recrystallization of ion-implanted amorphous Si",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SUNjap84",
    id = "https://authors.library.caltech.edu/records/7rehq-rh243",
    issn = "0021-8979",
    doi = "10.1063/1.333957",
    volume = "56",
    number = "2",
    pages = "273-278"
}


@article{https://authors.library.caltech.edu/records/7rmhd-cj326,
    author = "Cheng, Y-T. and Van Rossum, M. and Nicolet, M-A. and Johnson, W. L.",
    title = "Influence of chemical driving forces in ion mixing of metallic bilayers",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CHEapl84",
    id = "https://authors.library.caltech.edu/records/7rmhd-cj326",
    issn = "0003-6951",
    doi = "10.1063/1.95163",
    volume = "45",
    number = "2",
    pages = "185-187"
}


@article{https://authors.library.caltech.edu/records/14dv2-p4r71,
    author = "Lien, C.-D. and Nicolet, M-A.",
    title = "Mathematical model for a radioactive marker in silicide formation",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120702-094830929",
    id = "https://authors.library.caltech.edu/records/14dv2-p4r71",
    issn = "0021-8979",
    doi = "10.1063/1.333037",
    volume = "55",
    number = "12",
    pages = "4187-4193"
}


@article{https://authors.library.caltech.edu/records/hd9ek-yac67,
    author = "Van Rossum, M. and Nicolet, M-A. and Johnson, W. L.",
    title = "Amorphization of Hf-Ni films by solid-state reaction",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ROSprb84",
    id = "https://authors.library.caltech.edu/records/hd9ek-yac67",
    issn = "0163-1829",
    doi = "10.1103/PhysRevB.29.5498",
    volume = "29",
    number = "10",
    pages = "5498-5504"
}


@article{https://authors.library.caltech.edu/records/5yacg-5cp47,
    author = "Shreter, U. and So, Frank C. T. and Nicolet, M-A.",
    title = "Chromium silicide formation by ion mixing",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120702-115714409",
    id = "https://authors.library.caltech.edu/records/5yacg-5cp47",
    issn = "0021-8979",
    doi = "10.1063/1.332938",
    volume = "55",
    number = "10",
    pages = "3500-3504"
}


@article{https://authors.library.caltech.edu/records/pyfma-qh138,
    author = "Kung, K. T-Y. and Suni, I. and Nicolet, M-A.",
    title = "Electrical characteristics of amorphous molybdenum-nickel contacts to silicon",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:KUNjap84",
    id = "https://authors.library.caltech.edu/records/pyfma-qh138",
    issn = "0021-8979",
    doi = "10.1063/1.332905",
    volume = "55",
    number = "10",
    pages = "3882-3885"
}


@article{https://authors.library.caltech.edu/records/ex16m-9kn75,
    author = "Bartur, M. and Nicolet, M.-A.",
    title = "Utilization of NiSi\_2 as an interconnect material for VLSI",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170726-174538830",
    id = "https://authors.library.caltech.edu/records/ex16m-9kn75",
    issn = "0741-3106",
    doi = "10.1109/EDL.1984.25841",
    volume = "5",
    number = "3",
    pages = "88-90"
}


@article{https://authors.library.caltech.edu/records/m64j5-z6744,
    author = "Bartur, M. and Nicolet, M-A.",
    title = "Self-confined metallic interconnects for very large scale integration",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BARapl84a",
    id = "https://authors.library.caltech.edu/records/m64j5-z6744",
    issn = "0003-6951",
    doi = "10.1063/1.94692",
    volume = "44",
    number = "2",
    pages = "263-264"
}


@article{https://authors.library.caltech.edu/records/dch5b-qqm62,
    author = "Barcz, A. J. and Paine, B. M. and Nicolet, M-A.",
    title = "Ion mixing of markers in SiO2 and Si",
    year = "1984",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BARapl84c",
    id = "https://authors.library.caltech.edu/records/dch5b-qqm62",
    issn = "0003-6951",
    doi = "10.1063/1.94546",
    volume = "44",
    number = "1",
    pages = "45-47"
}


@article{https://authors.library.caltech.edu/records/rks7g-njd63,
    author = "Prabhakar, A. and McGill, T. C. and Nicolet, M.-A.",
    title = "Platinum diffusion into silicon from PtSi",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:PRAapl83",
    id = "https://authors.library.caltech.edu/records/rks7g-njd63",
    issn = "0003-6951",
    doi = "10.1063/1.94247",
    volume = "43",
    number = "12",
    pages = "1118-1120"
}


@article{https://authors.library.caltech.edu/records/jkzvk-e8h39,
    author = "Hung, L. S. and Gyulai, J. and Mayer, J. W. and Lau, S. S. and Nicolet, M-A.",
    title = "Kinetics of TiSi2 formation by thin Ti films on Si",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HUNjap83",
    id = "https://authors.library.caltech.edu/records/jkzvk-e8h39",
    issn = "0021-8979",
    doi = "10.1063/1.332781",
    volume = "54",
    number = "9",
    pages = "5076-5080"
}


@article{https://authors.library.caltech.edu/records/rzyxx-nkx37,
    author = "Bartur, M. and Nicolet, M-A.",
    title = "Marker experiments for diffusion in the silicide during oxidation of PdSi, Pd2Si, CoSi2, and NiSi2 films on <Si>",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BARjap83",
    id = "https://authors.library.caltech.edu/records/rzyxx-nkx37",
    issn = "0021-8979",
    doi = "10.1063/1.332721",
    volume = "54",
    number = "9",
    pages = "5404-5415"
}


@article{https://authors.library.caltech.edu/records/qngw5-hgh22,
    author = "Shreter, U. and Fernandez, R. and Nicolet, M-A.",
    title = "Temperature-dependent ion mixing and diffusion during sputtering of thin films of CrSi\_2 on silicon",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120717-090516601",
    id = "https://authors.library.caltech.edu/records/qngw5-hgh22",
    issn = "0003-6951",
    doi = "10.1063/1.94314",
    volume = "43",
    number = "3",
    pages = "247-249"
}


@article{https://authors.library.caltech.edu/records/3rk5a-35b05,
    author = "Finetti, M. and Pan, E. T-S. and Suni, I. and Nicolet, M-A.",
    title = "Electrical characteristics of amorphous iron-tungsten contacts on silicon",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:FINapl83",
    id = "https://authors.library.caltech.edu/records/3rk5a-35b05",
    issn = "0003-6951",
    doi = "10.1063/1.93824",
    volume = "42",
    number = "11",
    pages = "987-989"
}


@article{https://authors.library.caltech.edu/records/ca17r-29947,
    author = "Liu, B. X. and Clemens, B. M. and Gaboriaud, R. and Johnson, W. L. and Nicolet, M-A.",
    title = "Ion mixing to produce amorphous Mo-Ru superconducting films",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIUapl83b",
    id = "https://authors.library.caltech.edu/records/ca17r-29947",
    issn = "0003-6951",
    doi = "10.1063/1.94002",
    volume = "42",
    number = "7",
    pages = "624-626"
}


@article{https://authors.library.caltech.edu/records/ng5bz-z2a28,
    author = "Liu, Bai-Xin and Johnson, W. L. and Nicolet, M-A. and Lau, S. S.",
    title = "Structural difference rule for amorphous alloy formation by ion mixing",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LIUapl83a",
    id = "https://authors.library.caltech.edu/records/ng5bz-z2a28",
    issn = "0003-6951",
    doi = "10.1063/1.93767",
    volume = "42",
    number = "1",
    pages = "45-47"
}


@article{https://authors.library.caltech.edu/records/rdbyx-jgp57,
    author = "Matteson, S. and Nicolet, M-A.",
    title = "Ion Mixing",
    year = "1983",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120713-112400215",
    id = "https://authors.library.caltech.edu/records/rdbyx-jgp57",
    issn = "0084-6600",
    doi = "10.1146/annurev.ms.13.080183.002011",
    volume = "13",
    pages = "339-362"
}


@article{https://authors.library.caltech.edu/records/3nq46-d8n33,
    author = "Speriosu, V. S. and Paine, B. M. and Nicolet, M-A. and Glass, H. L.",
    title = "X-ray rocking curve study of Si-implanted GaAs, Si, and Ge",
    year = "1982",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SPEapl82",
    id = "https://authors.library.caltech.edu/records/3nq46-d8n33",
    issn = "0003-6951",
    doi = "10.1063/1.93195",
    volume = "40",
    number = "7",
    pages = "604-606"
}


@article{https://authors.library.caltech.edu/records/6r9fs-cz633,
    author = "Suni, I. and Göltz, G. and Grimaldi, M. G. and Nicolet, M-A. and Lau, S. S.",
    title = "Compensating impurity effect on epitaxial regrowth rate of amorphized Si",
    year = "1982",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:SUNapl82",
    id = "https://authors.library.caltech.edu/records/6r9fs-cz633",
    issn = "0003-6951",
    doi = "10.1063/1.93034",
    volume = "40",
    number = "3",
    pages = "269-271"
}


@article{https://authors.library.caltech.edu/records/b05e0-ye922,
    author = "Mäenpää, M. and Kuech, T. F. and Nicolet, M-A. and Lau, S. S. and Sadana, D. K.",
    title = "The heteroepitaxy of Ge on Si: A comparison of chemical vapor and vacuum deposited layers",
    year = "1982",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:MAEjap82",
    id = "https://authors.library.caltech.edu/records/b05e0-ye922",
    issn = "0021-8979",
    doi = "10.1063/1.330519",
    volume = "53",
    number = "2",
    pages = "1076-1083"
}


@article{https://authors.library.caltech.edu/records/qp0v8-5xe33,
    author = "Wieluński, L. S. and Lien, C. -D. and Liu, B. X. and Nicolet, M.-A.",
    title = "Improvement of thermally formed nickel silicide by ion irradiation",
    year = "1982",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120716-160347437",
    id = "https://authors.library.caltech.edu/records/qp0v8-5xe33",
    issn = "0022-5355",
    doi = "10.1116/1.571353",
    volume = "20",
    number = "2",
    pages = "182-185"
}


@article{https://authors.library.caltech.edu/records/spdw7-5bp63,
    author = "Bartur, M. and Nicolet, M-A.",
    title = "Thermal oxidation of nickel disilicide",
    year = "1982",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BARapl82a",
    id = "https://authors.library.caltech.edu/records/spdw7-5bp63",
    issn = "0003-6951",
    doi = "10.1063/1.93033",
    volume = "40",
    number = "2",
    pages = "175-177"
}


@article{https://authors.library.caltech.edu/records/6a5ev-g9093,
    author = "Bartur, M. and Nicolet, M-A.",
    title = "Electrical characteristics of Al contact to NiSi using thin W layer as a barrier",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BARapl81",
    id = "https://authors.library.caltech.edu/records/6a5ev-g9093",
    issn = "0003-6951",
    doi = "10.1063/1.92571",
    volume = "39",
    number = "10",
    pages = "822-824"
}


@article{https://authors.library.caltech.edu/records/sj3vy-yb197,
    author = "Nicolet, M-A. and Bartur, M.",
    title = "Diffusion barriers in layered contact structures",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:NICjvst81",
    id = "https://authors.library.caltech.edu/records/sj3vy-yb197",
    issn = "0022-5355",
    doi = "10.1116/1.571149",
    volume = "19",
    number = "3",
    pages = "786-793"
}


@article{https://authors.library.caltech.edu/records/etpas-kgf61,
    author = "Grunthaner, P. J. and Grunthaner, F. J. and Scott, D. M. and Nicolet, M-A. and Mayer, J. W.",
    title = "Oxygen impurity effects at metal/silicide interfaces: Formation of silicon oxide and suboxides in the Ni/Si system",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GRUjvst81",
    id = "https://authors.library.caltech.edu/records/etpas-kgf61",
    issn = "0022-5355",
    doi = "10.1116/1.571078",
    volume = "19",
    number = "3",
    pages = "641-648"
}


@article{https://authors.library.caltech.edu/records/2s4t1-hre56,
    author = "Grimaldi, M. G. and Paine, B. M. and Mäenpää, M. and Nicolet, M.-A. and Sadana, D. K.",
    title = "Epitaxial regrowth of thin amorphous GaAs layers",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GRIapl81",
    id = "https://authors.library.caltech.edu/records/2s4t1-hre56",
    issn = "0003-6951",
    doi = "10.1063/1.92520",
    volume = "39",
    number = "1",
    pages = "70-72"
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@article{https://authors.library.caltech.edu/records/yzqkn-r7015,
    author = "Grimaldi, M. G. and Paine, B. M. and Nicolet, M-A. and Sadana, D. K.",
    title = "Ion implantation and low-temperature epitaxial regrowth of GaAs",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120717-155107148",
    id = "https://authors.library.caltech.edu/records/yzqkn-r7015",
    issn = "0021-8979",
    doi = "10.1063/1.329213",
    volume = "52",
    number = "6",
    pages = "4038-4046"
}


@article{https://authors.library.caltech.edu/records/2es4f-17h42,
    author = "Tsaur, B. Y. and Lau, S. S. and Mayer, J. W. and Nicolet, M-A.",
    title = "Sequence of phase formation in planar metal-Si reaction couples",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TSAapl81",
    id = "https://authors.library.caltech.edu/records/2es4f-17h42",
    issn = "0003-6951",
    doi = "10.1063/1.92183",
    volume = "38",
    number = "11",
    pages = "922-924"
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@article{https://authors.library.caltech.edu/records/hrqs4-89877,
    author = "Cheung, N. W. and von Seefeld, H. and Nicolet, M-A. and Ho, F. and Iles, P.",
    title = "Thermal stability of titanium nitride for shallow junction solar cell contacts",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CHEjap81",
    id = "https://authors.library.caltech.edu/records/hrqs4-89877",
    issn = "0021-8979",
    doi = "10.1063/1.329283",
    volume = "52",
    number = "6",
    pages = "4297-4299"
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@article{https://authors.library.caltech.edu/records/q1762-p9n92,
    author = "Grimaldi, M. G. and Mäenpää, M. and Paine, B. M. and Nicolet, M-A. and Lau, S. S. and Tseng, W. F.",
    title = "Epitaxial growth of amorphous Ge films deposited on single-crystal Ge",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:GRIjap81",
    id = "https://authors.library.caltech.edu/records/q1762-p9n92",
    issn = "0021-8979",
    doi = "10.1063/1.329763",
    volume = "52",
    number = "3",
    pages = "1351-1355"
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@article{https://authors.library.caltech.edu/records/twvaj-5xv22,
    author = "Wieluński, L. and Scott, D. M. and Nicolet, M-A. and von Seefeld, H.",
    title = "Alteration of Ni silicide formation by N implantation",
    year = "1981",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120719-133310810",
    id = "https://authors.library.caltech.edu/records/twvaj-5xv22",
    issn = "0003-6951",
    doi = "10.1063/1.92259",
    volume = "38",
    number = "2",
    pages = "106-108"
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@article{https://authors.library.caltech.edu/records/9wjg5-a0x80,
    author = "Tsaur, B. Y. and Nicolet, M-A.",
    title = "Reversible phase transformation in the Pd2Si-PdSi thin-film system",
    year = "1980",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TSAapl80",
    id = "https://authors.library.caltech.edu/records/9wjg5-a0x80",
    issn = "0003-6951",
    doi = "10.1063/1.92054",
    volume = "37",
    number = "8",
    pages = "708-711"
}


@article{https://authors.library.caltech.edu/records/8t7cq-whs82,
    author = "Masuyama, A. and Nicolet, M.-A. and Golecki, I. and Tandon, J. L. and Sadana, D. K. and Washburn, J.",
    title = "Steady-state thermally annealed GaAs with room-temperature-implanted Si",
    year = "1980",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:MASapl80",
    id = "https://authors.library.caltech.edu/records/8t7cq-whs82",
    issn = "0003-6951",
    doi = "10.1063/1.91637",
    volume = "36",
    number = "9",
    pages = "749-751"
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@article{https://authors.library.caltech.edu/records/rg0v0-ezs97,
    author = "von Seefeld, Hermann and Cheung, Nathan W. and Mäenpää, Martti and Nicolet, Marc-A.",
    title = "Investigation of titanium-nitride layers for solar-cell contacts",
    year = "1980",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170802-155903092",
    id = "https://authors.library.caltech.edu/records/rg0v0-ezs97",
    issn = "0018-9383",
    doi = "10.1109/T-ED.1980.19949",
    volume = "27",
    number = "4",
    pages = "873-876"
}


@article{https://authors.library.caltech.edu/records/v4r0p-7pz41,
    author = "Campisano, S. U. and Foti, G. and Rimini, E. and Eisen, F. H. and Tseng, W. F. and Nicolet, M-A. and Tandon, J. L.",
    title = "Laser pulse annealing of ion-implanted GaAs",
    year = "1980",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CAMjap80",
    id = "https://authors.library.caltech.edu/records/v4r0p-7pz41",
    issn = "0021-8979",
    doi = "10.1063/1.327369",
    volume = "51",
    number = "1",
    pages = "295-298"
}


@article{https://authors.library.caltech.edu/records/skfs2-c5d13,
    author = "Tandon, J. L. and Golecki, I. and Nicolet, M-A. and Sadana, D. K. and Washburn, J.",
    title = "Pulsed electron beam induced recrystallization and damage in GaAs",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TANapl79c",
    id = "https://authors.library.caltech.edu/records/skfs2-c5d13",
    issn = "0003-6951",
    doi = "10.1063/1.90987",
    volume = "35",
    number = "11",
    pages = "867-870"
}


@article{https://authors.library.caltech.edu/records/nf8pa-shg73,
    author = "Tsaur, B. Y. and Matteson, S. and Chapman, G. and Liau, Z. L. and Nicolet, M-A.",
    title = "Depth dependence of atomic mixing by ion beams",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TSAapl79",
    id = "https://authors.library.caltech.edu/records/nf8pa-shg73",
    issn = "0003-6951",
    doi = "10.1063/1.90951",
    volume = "35",
    number = "10",
    pages = "825-828"
}


@article{https://authors.library.caltech.edu/records/hbv71-v3s64,
    author = "Roulet, M. E. and Schwob, P. and Golecki, I. and Nicolet, M.-A.",
    title = "Electrical properties of silicon-implanted furnace-annealed silicon-on-sapphire devices",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170807-155031287",
    id = "https://authors.library.caltech.edu/records/hbv71-v3s64",
    issn = "0013-5194",
    doi = "10.1049/el:19790380",
    volume = "15",
    number = "17",
    pages = "527-529"
}


@article{https://authors.library.caltech.edu/records/hnq1n-x2r13,
    author = "Lau, S. S. and von Allmen, M. and Golecki, I. and Nicolet, M.-A. and Kennedy, E. F. and Tseng, W. F.",
    title = "Solar furnace annealing of amorphous Si layers",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LAUapl79",
    id = "https://authors.library.caltech.edu/records/hnq1n-x2r13",
    issn = "0003-6951",
    doi = "10.1063/1.91109",
    volume = "35",
    number = "4",
    pages = "327-329"
}


@article{https://authors.library.caltech.edu/records/9hs12-dxz80,
    author = "Roulet, M. E. and Schwob, P. and Affolter, K. and Lüthy, W. and von Allmen, M. and Fallavier, M. and Mackowski, J. M. and Nicolet, M. A. and Thomas, J. P.",
    title = "Laser annealing of silicon on sapphire",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:ROUjap79",
    id = "https://authors.library.caltech.edu/records/9hs12-dxz80",
    issn = "0021-8979",
    doi = "10.1063/1.326616",
    volume = "50",
    number = "8",
    pages = "5536-5538"
}


@article{https://authors.library.caltech.edu/records/654hy-d9w25,
    author = "Tandon, J. L. and Nicolet, M-A. and Tseng, W. F. and Eisen, F. H. and Campisano, S. U. and Foti, G. and Rimini, E.",
    title = "Pulsed-laser annealing of implanted layers in GaAs",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TANapl79b",
    id = "https://authors.library.caltech.edu/records/654hy-d9w25",
    issn = "0003-6951",
    doi = "10.1063/1.90887",
    volume = "34",
    number = "9",
    pages = "597-599"
}


@article{https://authors.library.caltech.edu/records/bsks4-qae25,
    author = "Matteson, S. and Tonn, D. G. and Nicolet, M-A.",
    title = "Diagnostic test for ion implantation dosimetry",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120726-110219420",
    id = "https://authors.library.caltech.edu/records/bsks4-qae25",
    issn = "0022-5355",
    doi = "10.1116/1.570106",
    volume = "16",
    number = "3",
    pages = "882-883"
}


@article{https://authors.library.caltech.edu/records/drjzh-vad36,
    author = "Tandon, J. L. and Nicolet, M-A. and Eisen, F. H.",
    title = "Silicon implantation in GaAs",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:TANapl79a",
    id = "https://authors.library.caltech.edu/records/drjzh-vad36",
    issn = "0003-6951",
    doi = "10.1063/1.90715",
    volume = "34",
    number = "2",
    pages = "165-167"
}


@article{https://authors.library.caltech.edu/records/9gk0d-hvm41,
    author = "von Allmen, M. and Lüthy, W. and Thomas, J. P. and Fallavier, M. and Mackowski, J. M. and Kirsch, R. and Nicolet, M-A. and Roulet, M. E.",
    title = "Influence of the absorption coefficient in Nd laser annealing of amorphized semiconductor layers",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120727-101306063",
    id = "https://authors.library.caltech.edu/records/9gk0d-hvm41",
    issn = "0003-6951",
    doi = "10.1063/1.90568",
    volume = "34",
    number = "1",
    pages = "82-84"
}


@article{https://authors.library.caltech.edu/records/n1d8n-hkm32,
    author = "Finstad, T. G. and Nicolet, M-A.",
    title = "Silicide formation with bilayers of Pd-Pt, Pd-Ni, and Pt-Ni",
    year = "1979",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:FINjap79",
    id = "https://authors.library.caltech.edu/records/n1d8n-hkm32",
    issn = "0021-8979",
    doi = "10.1063/1.325659",
    volume = "50",
    number = "1",
    pages = "303-307"
}


@article{https://authors.library.caltech.edu/records/w2g8q-rkn26,
    author = "Lau, S. S. and Tseng, W. F. and Nicolet, M-A. and Mayer, J. W. and Minnucci, J. A. and Kirkpatrick, A. R.",
    title = "Heteroepitaxy of deposited amorphous layer by pulsed electron-beam irradiation",
    year = "1978",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LAUapl78b",
    id = "https://authors.library.caltech.edu/records/w2g8q-rkn26",
    issn = "0003-6951",
    doi = "10.1063/1.90310",
    volume = "33",
    number = "3",
    pages = "235-237"
}


@article{https://authors.library.caltech.edu/records/tdx33-zrs19,
    author = "Lau, S. S. and Tseng, W. F. and Nicolet, M-A. and Mayer, J. W. and Eckardt, R. C. and Wagner, R. J.",
    title = "Epitaxial growth of deposited amorphous layer by laser annealing",
    year = "1978",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LAUapl78a",
    id = "https://authors.library.caltech.edu/records/tdx33-zrs19",
    issn = "0003-6951",
    doi = "10.1063/1.90280",
    volume = "33",
    number = "2",
    pages = "130-131"
}


@article{https://authors.library.caltech.edu/records/7z8f2-mer56,
    author = "Mayer, James W. and Kullen, R. Philip and Nicolet, Marc A. and Purser, Kenneth H.",
    title = "Use of ion beams in space",
    year = "1977",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120803-103105025",
    id = "https://authors.library.caltech.edu/records/7z8f2-mer56",
    issn = "0022-5355",
    doi = "10.1116/1.569366",
    volume = "14",
    number = "6",
    pages = "1281"
}


@article{https://authors.library.caltech.edu/records/tb27w-2xa67,
    author = "Pretorius, R. and Liau, Z. L. and Lau, S. S. and Nicolet, M-A.",
    title = "Growth mechanism for solid-phase epitaxy of Si in the Si <100>/Pd2Si/Si(amorphous) system studied by a radioactive tracer technique",
    year = "1977",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:PREjap77",
    id = "https://authors.library.caltech.edu/records/tb27w-2xa67",
    issn = "0021-8979",
    doi = "10.1063/1.324098",
    volume = "48",
    number = "7",
    pages = "2886-2890"
}


@article{https://authors.library.caltech.edu/records/96nzt-c8098,
    author = "Harris, J. M. and Blattner, R. J. and Ward, I. D. and Evans, C. A., Jr. and Fraser, H. L. and Nicolet, M. A. and Ramiller, C. L.",
    title = "Solid-phase crystallization of Si films in contact with Al layers",
    year = "1977",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HARjap77",
    id = "https://authors.library.caltech.edu/records/96nzt-c8098",
    issn = "0021-8979",
    doi = "10.1063/1.324100",
    volume = "48",
    number = "7",
    pages = "2897-2904"
}


@article{https://authors.library.caltech.edu/records/84p9f-0rb58,
    author = "Wittmer, W. and Finstad, T. and Nicolet, M-A.",
    title = "Investigation of the Au-Ge-Ni and Au-Ge-Pt system used
 for alloyed contacts to GaAs",
    year = "1977",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120802-111429967",
    id = "https://authors.library.caltech.edu/records/84p9f-0rb58",
    issn = "0022-5355",
    doi = "10.1116/1.569392",
    volume = "14",
    number = "4",
    pages = "935-936"
}


@article{https://authors.library.caltech.edu/records/yfrtm-6ae34,
    author = "Pretorius, R. and Ramiller, C. L. and Lau, S. S. and Nicolet, M.-A.",
    title = "Radioactive silicon as a marker in thin-film silicide formation",
    year = "1977",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:PREapl77",
    id = "https://authors.library.caltech.edu/records/yfrtm-6ae34",
    issn = "0003-6951",
    doi = "10.1063/1.89230",
    volume = "30",
    number = "10",
    pages = "501-503"
}


@article{https://authors.library.caltech.edu/records/09bj1-se884,
    author = "Lau, S. S. and Liau, Z. L. and Nicolet, M-A. and Mayer, J. W.",
    title = "Heterostructure by solid‐phase epitaxy in the Si〈111〉/Pd/Si (amorphous) system",
    year = "1977",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120808-085747179",
    id = "https://authors.library.caltech.edu/records/09bj1-se884",
    issn = "0021-8979",
    doi = "10.1063/1.323708",
    volume = "48",
    number = "3",
    pages = "917-919"
}


@article{https://authors.library.caltech.edu/records/fnzqg-nhg82,
    author = "Olowolafe, J. O. and Nicolet, M.-A. and Mayer, J. W.",
    title = "Formation kinetics of CrSi2 films on Si substrates with and without interposed Pd2Si layer",
    year = "1976",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:OLOjap76",
    id = "https://authors.library.caltech.edu/records/fnzqg-nhg82",
    issn = "0021-8979",
    doi = "10.1063/1.322591",
    volume = "47",
    number = "12",
    pages = "5182-5186"
}


@article{https://authors.library.caltech.edu/records/fatmz-3y617,
    author = "Pretorius, R. and Liau, Z. L. and Lau, S. S. and Nicolet, M.-A.",
    title = "Dissociation mechanism for solid-phase epitaxy of silicon in the Si <100>/Pd2Si/Si (amorphous) system",
    year = "1976",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:PREapl76",
    id = "https://authors.library.caltech.edu/records/fatmz-3y617",
    issn = "0003-6951",
    doi = "10.1063/1.89156",
    volume = "29",
    number = "9",
    pages = "598-600"
}


@article{https://authors.library.caltech.edu/records/y6des-8ks27,
    author = "Nakamura, K. and Olowolafe, J. O. and Lau, S. S. and Nicolet, M-A. and Mayer, J. W. and Shima, R.",
    title = "Interaction of metal layers with polycrystalline Si",
    year = "1976",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:NAKjap76",
    id = "https://authors.library.caltech.edu/records/y6des-8ks27",
    issn = "0021-8979",
    doi = "10.1063/1.322826",
    volume = "47",
    number = "4",
    pages = "1278-1283"
}


@article{https://authors.library.caltech.edu/records/t9h3q-s1k62,
    author = "Nakamura, K. and Lau, S. S. and Nicolet, M-A. and Mayer, J. W.",
    title = "Ti and V layers retard interaction between Al films and polycrystalline Si",
    year = "1976",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:NAKapl76",
    id = "https://authors.library.caltech.edu/records/t9h3q-s1k62",
    issn = "0003-6951",
    doi = "10.1063/1.88734",
    volume = "28",
    number = "5",
    pages = "277-280"
}


@article{https://authors.library.caltech.edu/records/mqfqc-tev55,
    author = "Lau, S. S. and Canali, C. and Liau, Z. L. and Nakamura, K. and Nicolet, M.-A. and Mayer, J. W. and Blattner, Richard J. and Evans, C. A., Jr.",
    title = "Antimony doping of Si layers grown by solid-phase epitaxy",
    year = "1976",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LAUapl76",
    id = "https://authors.library.caltech.edu/records/mqfqc-tev55",
    issn = "0003-6951",
    doi = "10.1063/1.88670",
    volume = "28",
    number = "3",
    pages = "148-150"
}


@article{https://authors.library.caltech.edu/records/mfbfr-sv222,
    author = "Nakamura, K. and Nicolet, M-A. and Mayer, J. W. and Blattner, R. J. and Evans, C. A., Jr.",
    title = "Interaction of Al layers with polycrystalline Si",
    year = "1975",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:NAKjap75",
    id = "https://authors.library.caltech.edu/records/mfbfr-sv222",
    issn = "0021-8979",
    doi = "10.1063/1.321530",
    volume = "46",
    number = "11",
    pages = "4678-4684"
}


@article{https://authors.library.caltech.edu/records/q2a0y-7e443,
    author = "Feng, J. S.-Y. and Pashley, R. D. and Nicolet, M.-A.",
    title = "Magnetoelectric properties of magnetite thin films",
    year = "1975",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:FENjpcss75",
    id = "https://authors.library.caltech.edu/records/q2a0y-7e443",
    issn = "0022-3719",
    volume = "8",
    number = "7",
    pages = "1010-1022"
}


@article{https://authors.library.caltech.edu/records/ec1ez-m3w98,
    author = "Malm, H. L. and Canali, C. and Mayer, J. W. and Nicolet, M–A. and Zanio, K. R. and Akutagawa, W.",
    title = "Gamma–ray spectroscopy with single–carrier collection in high–resistivity semiconductors",
    year = "1975",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:MALapl75",
    id = "https://authors.library.caltech.edu/records/ec1ez-m3w98",
    issn = "0003-6951",
    doi = "10.1063/1.88158",
    volume = "26",
    number = "6",
    pages = "344-346"
}


@article{https://authors.library.caltech.edu/records/j0d5w-14r22,
    author = "Harris, J. M. and Nicolet, M-A.",
    title = "Energy straggling of 4He ions below 2.0 MeV in Al, Ni, and Au",
    year = "1975",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HARprb75",
    id = "https://authors.library.caltech.edu/records/j0d5w-14r22",
    issn = "0163-1829",
    doi = "10.1103/PhysRevB.11.1013",
    volume = "11",
    number = "3",
    pages = "1013-1019"
}


@article{https://authors.library.caltech.edu/records/cb2yc-zj341,
    author = "Mayer, J. W. and Nicolet, M-A. and Chu, W. K.",
    title = "Backscattering spectrometry",
    year = "1975",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120803-104952611",
    id = "https://authors.library.caltech.edu/records/cb2yc-zj341",
    issn = "0022-5355",
    doi = "10.1116/1.568788",
    volume = "12",
    number = "1",
    pages = "356"
}


@article{https://authors.library.caltech.edu/records/jbq95-fcs72,
    author = "Harris, J. M. and Nicolet, M-A.",
    title = "Energy straggling of 4He ions below 2.0 MeV in Al, Ni, Pt, and Au",
    year = "1975",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HARjvst75b",
    id = "https://authors.library.caltech.edu/records/jbq95-fcs72",
    issn = "0022-5355",
    doi = "10.1116/1.568596",
    volume = "12",
    number = "1",
    pages = "439-443"
}


@article{https://authors.library.caltech.edu/records/aap7k-r4a48,
    author = "Harris, J. M. and Lugujjo, E. and Campisano, S. U. and Nicolet, M-A. and Shima, R.",
    title = "Studies on the Al2O3–Ti–Mo–Au metallization system",
    year = "1975",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HARjvst75a",
    id = "https://authors.library.caltech.edu/records/aap7k-r4a48",
    issn = "0022-5355",
    doi = "10.1116/1.568580",
    volume = "12",
    number = "1",
    pages = "524-527"
}


@article{https://authors.library.caltech.edu/records/kt6yj-7ka93,
    author = "Feng, J. S.-Y. and Chu, W. K. and Nicolet, M-A.",
    title = "Stopping-cross-section additivity for 1-2-MeV 4He+ in solid oxides",
    year = "1974",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:FENprb74",
    id = "https://authors.library.caltech.edu/records/kt6yj-7ka93",
    issn = "0556-2805",
    doi = "10.1103/PhysRevB.10.3781",
    volume = "10",
    number = "9",
    pages = "3781-3789"
}


@article{https://authors.library.caltech.edu/records/4bw5s-a9w38,
    author = "Chu, W. K. and Kraütle, H. and Mayer, J. W. and Müller, H. and Nicolet, M.-A. and Tu, K. N.",
    title = "Identification of the dominant diffusing species in silicide formation",
    year = "1974",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:CHUapl74",
    id = "https://authors.library.caltech.edu/records/4bw5s-a9w38",
    issn = "0003-6951",
    doi = "10.1063/1.1655546",
    volume = "25",
    number = "8",
    pages = "454-457"
}


@article{https://authors.library.caltech.edu/records/xtrgr-82570,
    author = "Kräutle, H. and Nicolet, M-A. and Mayer, J. W.",
    title = "Kinetics of silicide formation by thin films of V on Si and SiO\_2 substrates",
    year = "1974",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120809-110703213",
    id = "https://authors.library.caltech.edu/records/xtrgr-82570",
    issn = "0021-8979",
    doi = "10.1063/1.1663776",
    volume = "45",
    number = "8",
    pages = "3304-3308"
}


@article{https://authors.library.caltech.edu/records/cwnpz-4g143,
    author = "Nicolet, M.-A. and Mayer, J. W. and Mitchell, I. V.",
    title = "Microanalysis of Materials by Backscattering Spectrometry",
    year = "1972",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20151111-095217502",
    id = "https://authors.library.caltech.edu/records/cwnpz-4g143",
    issn = "0036-8075",
    doi = "10.1126/science.177.4052.841",
    volume = "177",
    number = "4052",
    pages = "841-849"
}


@article{https://authors.library.caltech.edu/records/2ykb7-m9r05,
    author = "Feng, Joseph S.-Y. and Bajorek, Christopher H. and Nicolet, Marc-A.",
    title = "Magnetite thin films",
    year = "1972",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170810-154316923",
    id = "https://authors.library.caltech.edu/records/2ykb7-m9r05",
    issn = "0018-9464",
    doi = "10.1109/TMAG.1972.1067513",
    volume = "8",
    number = "3",
    pages = "277-278"
}


@article{https://authors.library.caltech.edu/records/h3rc1-7mg55,
    author = "Ottaviani, G. and Marrello, V. and Mayer, J. W. and Nicolet, M-A. and Caywood, J. M.",
    title = "Formation of Injecting and Blocking Contacts on High-Resistivity Germanium",
    year = "1972",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:OTTapl72",
    id = "https://authors.library.caltech.edu/records/h3rc1-7mg55",
    issn = "0003-6951",
    doi = "10.1063/1.1654169",
    volume = "20",
    number = "8",
    pages = "323-325"
}


@article{https://authors.library.caltech.edu/records/0mc32-0f296,
    author = "Hoeneisen, B. and Mead, C. A. and Nicolet, M-A.",
    title = "Permittivity of β-Ga\_2O\_3 at low frequencies",
    year = "1971",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150929-092908338",
    id = "https://authors.library.caltech.edu/records/0mc32-0f296",
    issn = "0038-1101",
    doi = "10.1016/0038-1101(71)90176-6",
    volume = "14",
    number = "10",
    pages = "1057-1059"
}


@article{https://authors.library.caltech.edu/records/t6909-wz568,
    author = "Bajorek, C. H. and Nicolet, M.-A. and Wilts, C. H.",
    title = "Preferential Oxidation of Fe in Permalloy Films",
    year = "1971",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:BAJapl71",
    id = "https://authors.library.caltech.edu/records/t6909-wz568",
    issn = "0003-6951",
    doi = "10.1063/1.1653842",
    volume = "19",
    number = "4",
    pages = "82-84"
}


@article{https://authors.library.caltech.edu/records/cekhf-qn095,
    author = "Hiraki, A. and Nicolet, M-A. and Mayer, J. W.",
    title = "Low-temperature migration of silicon in thin layers of gold platinum",
    year = "1971",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:HIRapl71",
    id = "https://authors.library.caltech.edu/records/cekhf-qn095",
    issn = "0003-6951",
    doi = "10.1063/1.1653615",
    volume = "18",
    number = "5",
    pages = "178-181"
}


@article{https://authors.library.caltech.edu/records/a51sz-jgq37,
    author = "Bilger, H. R. and Nicolet, M.-A.",
    title = "A Flexible Simple Thermostat for Small Objects and the Range of 100 to 400 K",
    year = "1970",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120730-121345445",
    id = "https://authors.library.caltech.edu/records/a51sz-jgq37",
    issn = "0034-6748",
    doi = "10.1063/1.1684513",
    volume = "41",
    number = "3",
    pages = "346-347"
}


@article{https://authors.library.caltech.edu/records/h6d0p-4b791,
    author = "Lee, D. H. and Nicolet, M. -A.",
    title = "Thermal noise in double injection",
    year = "1969",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:LEEpr69",
    id = "https://authors.library.caltech.edu/records/h6d0p-4b791",
    issn = "0031-899X",
    doi = "10.1103/PhysRev.184.806",
    volume = "184",
    number = "3",
    pages = "806-808"
}


@article{https://authors.library.caltech.edu/records/kd4k5-wsd78,
    author = "Rodriguez, V. and Nicolet, M-A.",
    title = "Drift velocity of electrons in silicon at high electric fields from 4.2° to 300°K",
    year = "1969",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:RODjap69",
    id = "https://authors.library.caltech.edu/records/kd4k5-wsd78",
    issn = "0021-8979",
    doi = "10.1063/1.1657427",
    volume = "40",
    number = "2",
    pages = "496-498"
}


@article{https://authors.library.caltech.edu/records/fhzfv-net19,
    author = "Bilger, H. R. and Lee, D. H. and Nicolet, M-A. and McCarter, E. R.",
    title = "Noise and Equivalent Circuit of Double Injection",
    year = "1968",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120827-112350834",
    id = "https://authors.library.caltech.edu/records/fhzfv-net19",
    issn = "0021-8979",
    doi = "10.1063/1.1656089",
    volume = "39",
    number = "13",
    pages = "5913-5918"
}


@article{https://authors.library.caltech.edu/records/hbvr0-dvx44,
    author = "Rodriguez, V. and Ruegg, H. and Nicolet, M.-A.",
    title = "Measurement of the drift velocity of holes in silicon at high-field strengths",
    year = "1967",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170814-171148315",
    id = "https://authors.library.caltech.edu/records/hbvr0-dvx44",
    issn = "0018-9383",
    doi = "10.1109/T-ED.1967.15894",
    volume = "14",
    number = "1",
    pages = "44-46"
}


@article{https://authors.library.caltech.edu/records/gs5zw-05013,
    author = "Nicolet, M.-A. and Bilger, H. R. and McCarter, E. R.",
    title = "Noise suppression in a double-injection silicon diode",
    year = "1966",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:NICapl66",
    id = "https://authors.library.caltech.edu/records/gs5zw-05013",
    issn = "0003-6951",
    doi = "10.1063/1.1754643",
    volume = "9",
    number = "12",
    pages = "434-436"
}


@article{https://authors.library.caltech.edu/records/eaq4x-xhf65,
    author = "Nicolet, M-A.",
    title = "Unipolar space-charge-limited current in solids with nonuniform spacial distribution of shallow traps",
    year = "1966",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:NICjap66",
    id = "https://authors.library.caltech.edu/records/eaq4x-xhf65",
    issn = "0021-8979",
    doi = "10.1063/1.1708004",
    volume = "37",
    number = "11",
    pages = "4224-4235"
}


@article{https://authors.library.caltech.edu/records/vkmpv-8tk30,
    author = "Baron, R. and Nicolet, M-A. and Rodriguez, V.",
    title = "Differential Step Response of Unipolar Space-Charge-Limited Current in Solids",
    year = "1966",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120827-110918315",
    id = "https://authors.library.caltech.edu/records/vkmpv-8tk30",
    issn = "0021-8979",
    doi = "10.1063/1.1707992",
    volume = "37",
    number = "11",
    pages = "4156-4158"
}


@article{https://authors.library.caltech.edu/records/gbsmp-wzg36,
    author = "Denda, S. and Nicolet, M-A.",
    title = "Pure Space-Charge-Limited Electron Current in Silicon",
    year = "1966",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120828-070404189",
    id = "https://authors.library.caltech.edu/records/gbsmp-wzg36",
    issn = "0021-8979",
    doi = "10.1063/1.1708829",
    volume = "37",
    number = "6",
    pages = "2412-2424"
}