<h1>Muller, Richard Stephen</h1>
<h2>Combined from <a href="https://authors.library.caltech.edu">CaltechAUTHORS</a></h2>
<ul>
<li>Garmire, David and Choo, Hyuck, el al. (2011) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20151029-165522961">Integrated MEMS metrology device using complementary measuring combs</a></li>
<li>Choo, Hyuck and Muller, Richard S. (2010) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20151104-154140477">Optical switch using frequency-based addressing in a microelectromechanical systems array</a></li>
<li>Choo, Hyuck and Garmire, David, el al. (2009) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20151104-153631368">Method for fabricating vertically-offset interdigitated comb actuator device</a></li>
<li>Choo, Hyuck and Muller, Richard S., el al. (2009) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584">MEMS-based, phase-shifting interferometer</a></li>
<li>Choo, Hyuck and Muller, Richard S. (2008) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20151104-162038645">Optical system applicable to improving the dynamic range of Shack-Hartmann sensors</a></li>
<li>Choo, Hyuck and Muller, Richard S. (2007) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150804-110005309">Devices, Structures, and Processes for Optical MEMS</a>; IEEJ Transactions on Electrical and Electronic Engineering; Vol. 2; No. 3; 216-231; <a href="https://doi.org/10.1002/tee.20156">10.1002/tee.20156</a></li>
<li>Choo, Hyuck and Garmire, David, el al. (2007) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150731-104702779">Simple Fabrication Process for Self-Aligned, High-Performance Microscanners—Demonstrated Use to Generate a 2-D Ablation Pattern</a>; Journal of Microelectromechanical Systems; Vol. 16; No. 2; 260-268; <a href="https://doi.org/10.1109/JMEMS.2007.895048">10.1109/JMEMS.2007.895048</a></li>
<li>Kant, R. and Garmire, D., el al. (2007) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150731-110953413">Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer</a>; ISBN 978-1-4244-0641-8; 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics; 57-58; <a href="https://doi.org/10.1109/OMEMS.2007.4373838">10.1109/OMEMS.2007.4373838</a></li>
<li>Garmire, D. and Choo, H., el al. (2007) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088">Diamagnetically Levitated MEMS Accelerometers</a>; ISBN 1-4244-0842-3; TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference; 1203-1206; <a href="https://doi.org/10.1109/SENSOR.2007.4300352">10.1109/SENSOR.2007.4300352</a></li>
<li>Choo, Hyuck and Muller, Richard S. (2006) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150730-165049120">Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors</a>; Journal of Microelectromechanical Systems; Vol. 15; No. 6; 1555-1567; <a href="https://doi.org/10.1109/JMEMS.2006.886011">10.1109/JMEMS.2006.886011</a></li>
<li>Kim, Jongbaeg and Choo, Hyuck, el al. (2006) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150730-165132033">Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon</a>; Journal of Microelectromechanical Systems; Vol. 15; No. 3; 553-562; <a href="https://doi.org/10.1109/JMEMS.2006.876789">10.1109/JMEMS.2006.876789</a></li>
<li>Choo, H. and Garmire, D., el al. (2005) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150730-164608152">A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner</a>; ISBN 0-7803-9278-7; IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005; 21-22; <a href="https://doi.org/10.1109/OMEMS.2005.1540056">10.1109/OMEMS.2005.1540056</a></li>
<li>Choo, Hyuck and Muller, Richard S. (2004) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150915-164937836">Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors</a>; ISBN 0964002450; Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 6-10, 2004 : technical digest</li>
<li>Gupta, Kishnan and Choo, Hyuck, el al. (2003) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431">Micromachined Polarization Beam Splitters for the Visible Spectrum</a>; ISBN 0-7803-7830-X; 2003 IEEE/LEOS International Conference on Optical MEMS; 171-172; <a href="https://doi.org/10.1109/OMEMS.2003.1233520">10.1109/OMEMS.2003.1233520</a></li>
<li>Kim, Jongbaeg and Choo, Hyuck, el al. (2003) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651">Microfabricated torsional actuator using self-aligned plastic deformation</a>; ISBN 0-7803-7731-1; 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 2003; 1015-1018; <a href="https://doi.org/10.1109/SENSOR.2003.1216940">10.1109/SENSOR.2003.1216940</a></li>
<li>Choo, Hyuck and Muller, Richard S. (2003) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697">Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology</a>; ISBN 0-7803-7830-X; 2003 IEEE/LEOS International Conference on Optical MEMS; 169-170; <a href="https://doi.org/10.1109/OMEMS.2003.1233519">10.1109/OMEMS.2003.1233519</a></li>
<li>Tai, Yu-Chong and Muller, Richard S. (1990) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20120509-154113327">Measurement of Young's modulus on microfabricated structures using a surface profiler</a>; <a href="https://doi.org/10.1109/MEMSYS.1990.110267">10.1109/MEMSYS.1990.110267</a></li>
<li>Tai, Yu-Chong and Fan, Long-Sheng, el al. (1989) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20120517-094304531">IC-processed micro-motors: design, technology, and testing</a>; <a href="https://doi.org/10.1109/MEMSYS.1989.77950">10.1109/MEMSYS.1989.77950</a></li>
<li>Fan, Long-Sheng and Tai, Yu-Chong, el al. (1988) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824840">IC-processed electrostatic micro-motors</a>; <a href="https://doi.org/10.1109/iedm.1988.32901">10.1109/iedm.1988.32901</a></li>
<li>Fan, Long-Sheng and Tai, Yu-Chong, el al. (1988) <a href="https://resolver.caltech.edu/CaltechAUTHORS:FANieeeted88">Integrated movable micromechanical structures for sensors and actuators</a>; IEEE Transactions on Electron Devices; Vol. 35; No. 6; 724-730; <a href="https://doi.org/10.1109/16.2523">10.1109/16.2523</a></li>
<li>Tai, Y. C. and Muller, R. S. (1988) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20120607-142008892">Fracture strain of LPCVD polysilicon</a>; <a href="https://doi.org/10.1109/SOLSEN.1988.26440">10.1109/SOLSEN.1988.26440</a></li>
</ul>