@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20180830-103505467,
    title = "Ion Beam Surface Layer Analysis",
    chapter = "Determination of Stopping Cross Sections by Rutherford Backscattering",
    year = "1976",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20180830-103505467",
    id = "record",
    isbn = "978-1-4615-8878-8",
    doi = "10.1007/978-1-4615-8876-4\_4"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20180830-102916110,
    title = "Ion Beam Surface Layer Analysis",
    chapter = "Analysis of Ga\_(1-x)Al\_xAs-GaAs Heteroepitaxial Layers by Proton Backscattering",
    year = "1976",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20180830-102916110",
    id = "record",
    isbn = "978-1-4615-8878-8",
    doi = "10.1007/978-1-4615-8876-4\_32"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170809-160158554,
    chapter = "Ion implantation in semiconductors",
    year = "1973",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170809-160158554",
    id = "record",
    doi = "10.1109/IEDM.1973.188633"
}