@other{https://resolver.caltech.edu/CaltechETD:etd-12182007-135252,
    title = "Micromechanical tuning elements for submillimeter wave integrated circuits",
    url = "https://resolver.caltech.edu/CaltechETD:etd-12182007-135252",
    id = "record",
    doi = "10.7907/g8rb-ds84"
}