@other{https://resolver.caltech.edu/CaltechETD:etd-10162007-133943,
    title = "Integrated micro devices for small scale gaseous flow study",
    year = "1995",
    url = "https://resolver.caltech.edu/CaltechETD:etd-10162007-133943",
    id = "record",
    doi = "10.7907/sra1-0d58"
}