<h1>Liu, Jianqiang</h1> <h2>Book Chapter from <a href="https://authors.library.caltech.edu">CaltechAUTHORS</a></h2> <ul> <li>Liu, Jianqiang and Tai, Yu-Chong, el al. (1993) <a href="https://resolver.caltech.edu/CaltechAUTHORS:20170531-173926630">In situ monitoring and universal modelling of sacrificial PSG etching using hydrofluoric acid</a>; ISBN 0-7803-0957-X; [1993] Proceedings IEEE Micro Electro Mechanical Systems; 71-76; <a href="https://doi.org/10.1109/MEMSYS.1993.296954">10.1109/MEMSYS.1993.296954</a></li> </ul>