Liu, Jianqiang

Book Chapter from CaltechAUTHORS

• Liu, Jianqiang and Tai, Yu-Chong, et el. (1993) In situ monitoring and universal modelling of sacrificial PSG etching using hydrofluoric acid; ISBN 0-7803-0957-X; [1993] Proceedings IEEE Micro Electro Mechanical Systems; 71-76; 10.1109/MEMSYS.1993.296954