@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170531-173926630,
    title = "[1993] Proceedings IEEE Micro Electro Mechanical Systems",
    chapter = "In situ monitoring and universal modelling of sacrificial PSG etching using hydrofluoric acid",
    year = "1993",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170531-173926630",
    id = "record",
    isbn = "0-7803-0957-X",
    doi = "10.1109/MEMSYS.1993.296954"
}