@other{https://resolver.caltech.edu/CaltechETD:etd-01072008-151023,
    title = "Silicon Micromachined Sensors and Actuators for Fluid Mechanics Applications",
    year = "1996",
    url = "https://resolver.caltech.edu/CaltechETD:etd-01072008-151023",
    id = "record",
    doi = "10.7907/k8pm-8g13"
}