@other{https://resolver.caltech.edu/CaltechETD:etd-09092005-131242,
    title = "Evolutionary techniques applied to mask-layout synthesis in micro-mechanical-electronic systems (MEMS)",
    year = "1999",
    url = "https://resolver.caltech.edu/CaltechETD:etd-09092005-131242",
    id = "record",
    doi = "10.7907/000q-7m05"
}