@other{https://resolver.caltech.edu/CaltechETD:etd-09092005-131242, title = "Evolutionary techniques applied to mask-layout synthesis in micro-mechanical-electronic systems (MEMS)", year = "1999", url = "https://resolver.caltech.edu/CaltechETD:etd-09092005-131242", id = "record", doi = "10.7907/000q-7m05" }