@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170228-165559617,
    title = "IEEE 24th International Conference on Micro Electro Mechanical Systems",
    chapter = "Parylene-C as a piezoelectric material",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170228-165559617",
    id = "record",
    isbn = "978-1-4244-9634-1",
    doi = "10.1109/MEMSYS.2011.5734464"
}