@other{https://resolver.caltech.edu/CaltechETD:etd-08172005-081926,
    title = "Silicon-micromachined flow sensors",
    url = "https://resolver.caltech.edu/CaltechETD:etd-08172005-081926",
    id = "record",
    doi = "10.7907/R2QN-SC72"
}