@article{https://resolver.caltech.edu/CaltechAUTHORS:20181212-160340698,
    title = "Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices",
    journal = "Proceedings of the IEEE",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20181212-160340698",
    id = "record",
    issn = "0018-9219",
    doi = "10.1109/jproc.2018.2860994",
    volume = "106"
}