@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150826-102151546,
    title = "Surface Chemistry and Beam-Solid Interactions",
    chapter = "Lattice Disordering, Phase Transition, and Substrate Temperature Effects in MeV-ion-Implanted III-V Compound Semiconductors",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150826-102151546",
    id = "record",
    isbn = "9781558990074",
    doi = "10.1557/PROC-201-375"
}