@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170522-165050873, title = "Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems", chapter = "A thermopneumatic microfluidic system", url = "https://resolver.caltech.edu/CaltechAUTHORS:20170522-165050873", id = "record", isbn = "0-7803-7185-2", doi = "10.1109/MEMSYS.2002.984051" } @article{https://resolver.caltech.edu/CaltechAUTHORS:YANjms99, title = "Design, fabrication, and testing of micromachined silicone rubbermembrane valves", journal = "Journal of Microelectromechanical Systems", url = "https://resolver.caltech.edu/CaltechAUTHORS:YANjms99", id = "record", issn = "1057-7157", doi = "10.1109/84.809053", volume = "8" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170523-165039037, title = "Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems", chapter = "A practical thermopneumatic valve", url = "https://resolver.caltech.edu/CaltechAUTHORS:20170523-165039037", id = "record", isbn = "0-7803-5194-0", doi = "10.1109/MEMSYS.1999.746792" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:GROmems98, title = "Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems", chapter = "Micro Balloon Actuators for Aerodynamic Control", url = "https://resolver.caltech.edu/CaltechAUTHORS:GROmems98", id = "record", isbn = "0-7803-4412-X", doi = "10.1109/MEMSYS.1998.659748" }