@article{https://resolver.caltech.edu/CaltechAUTHORS:YANjms99, title = "Design, fabrication, and testing of micromachined silicone rubbermembrane valves", journal = "Journal of Microelectromechanical Systems", url = "https://resolver.caltech.edu/CaltechAUTHORS:YANjms99", id = "record", issn = "1057-7157", doi = "10.1109/84.809053", volume = "8" }