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= "0003-0503", volume = "55" } @other{https://resolver.caltech.edu/CaltechAUTHORS:20151104-153631368, title = "Method for fabricating vertically-offset interdigitated comb actuator device", url = "https://resolver.caltech.edu/CaltechAUTHORS:20151104-153631368", id = "record" } @other{https://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584, title = "MEMS-based, phase-shifting interferometer", url = "https://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584", id = "record" } @other{https://resolver.caltech.edu/CaltechAUTHORS:20151104-162038645, title = "Optical system applicable to improving the dynamic range of Shack-Hartmann sensors", url = "https://resolver.caltech.edu/CaltechAUTHORS:20151104-162038645", id = "record" } @article{https://resolver.caltech.edu/CaltechAUTHORS:20150804-110005309, title = "Devices, Structures, and Processes for Optical MEMS", journal = "IEEJ Transactions on Electrical and Electronic Engineering", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150804-110005309", id = "record", issn = "1931-4981", doi = "10.1002/tee.20156", volume = "2" } @article{https://resolver.caltech.edu/CaltechAUTHORS:20150731-104702779, title = "Simple Fabrication Process for Self-Aligned, High-Performance Microscanners—Demonstrated Use to Generate a 2-D Ablation Pattern", journal = "Journal of Microelectromechanical Systems", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150731-104702779", id = "record", issn = "1057-7157", doi = "10.1109/JMEMS.2007.895048", volume = "16" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150731-110953413, title = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics", chapter = "Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150731-110953413", id = "record", isbn = "978-1-4244-0641-8", doi = "10.1109/OMEMS.2007.4373838" } 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"https://resolver.caltech.edu/CaltechAUTHORS:20150730-165132033", id = "record", issn = "1057-7157", doi = "10.1109/JMEMS.2006.876789", volume = "15" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-164608152, title = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005", chapter = "A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-164608152", id = "record", isbn = "0-7803-9278-7", doi = "10.1109/OMEMS.2005.1540056" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150915-164937836, title = "Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 6-10, 2004 : technical digest", chapter = "Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150915-164937836", id = "record", isbn = "0964002450" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431, title = "2003 IEEE/LEOS International Conference on Optical MEMS", chapter = "Micromachined Polarization Beam Splitters for the Visible Spectrum", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431", id = "record", isbn = "0-7803-7830-X", doi = "10.1109/OMEMS.2003.1233520" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651, title = "12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 2003", chapter = "Microfabricated torsional actuator using self-aligned plastic deformation", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651", id = "record", isbn = "0-7803-7731-1", doi = "10.1109/SENSOR.2003.1216940" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697, title = "2003 IEEE/LEOS International Conference on Optical MEMS", chapter = "Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology", url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697", id = "record", isbn = "0-7803-7830-X", doi = "10.1109/OMEMS.2003.1233519" }