@other{https://resolver.caltech.edu/CaltechETD:etd-09142005-105805,
    title = "The Strength of Polycrystalline Silicon at the Micro- and Nano-Scales with Applications to MEMS",
    url = "https://resolver.caltech.edu/CaltechETD:etd-09142005-105805",
    id = "record",
    doi = "10.7907/JPRZ-P277"
}