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    title = "The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations",
    journal = "Journal of the Mechanics and Physics of Solids",
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@article{https://resolver.caltech.edu/CaltechAUTHORS:20191028-152259537,
    title = "The mechanical strength of polysilicon films: Part 1. The influence of fabrication governed surface conditions",
    journal = "Journal of the Mechanics and Physics of Solids",
    year = "2003",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20191028-152259537",
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    title = "A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy",
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    volume = "42"
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    title = "Materials and Device Characterization in Micromachining III",
    chapter = "Microtensile tests with the aid of probe microscopy for the study of MEMS materials",
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    url = "https://resolver.caltech.edu/CaltechAUTHORS:20181204-132724650",
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    title = "Materials and Device Characterization in Micromachining",
    chapter = "Mechanical properties of thin polysilicon films by means of probe microscopy",
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    url = "https://resolver.caltech.edu/CaltechAUTHORS:20180813-091037460",
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