@article{https://resolver.caltech.edu/CaltechAUTHORS:CHAjmps03b, title = "The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations", journal = "Journal of the Mechanics and Physics of Solids", url = "https://resolver.caltech.edu/CaltechAUTHORS:CHAjmps03b", id = "record", issn = "0022-5096", doi = "10.1016/S0022-5096(03)00050-4", volume = "51" } @article{https://resolver.caltech.edu/CaltechAUTHORS:20191028-152259537, title = "The mechanical strength of polysilicon films: Part 1. The influence of fabrication governed surface conditions", journal = "Journal of the Mechanics and Physics of Solids", url = "https://resolver.caltech.edu/CaltechAUTHORS:20191028-152259537", id = "record", issn = "0022-5096", doi = "10.1016/S0022-5096(03)00051-6", volume = "51" } @article{https://resolver.caltech.edu/CaltechAUTHORS:CHAem02, title = "A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy", journal = "Experimental Mechanics", url = "https://resolver.caltech.edu/CaltechAUTHORS:CHAem02", id = "record", issn = "0014-4851", doi = "10.1007/BF02411051", volume = "42" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20181204-132724650, title = "Materials and Device Characterization in Micromachining III", chapter = "Microtensile tests with the aid of probe microscopy for the study of MEMS materials", url = "https://resolver.caltech.edu/CaltechAUTHORS:20181204-132724650", id = "record", isbn = "9780819438317", doi = "10.1117/12.395616" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20180813-091037460, title = "Materials and Device Characterization in Micromachining", chapter = "Mechanical properties of thin polysilicon films by means of probe microscopy", url = "https://resolver.caltech.edu/CaltechAUTHORS:20180813-091037460", id = "record", isbn = "9780819429711", doi = "10.1117/12.324072" }