Chasiotis, Ioannis

Book Chapter from CaltechAUTHORS

• Chasiotis, Ioannis and Knauss, Wolfgang G. (2000) Microtensile tests with the aid of probe microscopy for the study of MEMS materials; ISBN 9780819438317; Materials and Device Characterization in Micromachining III; 96-103; 10.1117/12.395616
• Chasiotis, Ioannis and Knauss, Wolfgang G. (1998) Mechanical properties of thin polysilicon films by means of probe microscopy; ISBN 9780819429711; Materials and Device Characterization in Micromachining; 66-75; 10.1117/12.324072