@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20181204-132724650,
    title = "Materials and Device Characterization in Micromachining III",
    chapter = "Microtensile tests with the aid of probe microscopy for the study of MEMS materials",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20181204-132724650",
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    isbn = "9780819438317",
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@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20180813-091037460,
    title = "Materials and Device Characterization in Micromachining",
    chapter = "Mechanical properties of thin polysilicon films by means of probe microscopy",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20180813-091037460",
    id = "record",
    isbn = "9780819429711",
    doi = "10.1117/12.324072"
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