@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150304-090025874,
    title = "Materials Modification and Growth Using Ion Beams",
    chapter = "Defects Annealing of Si^+ Implanted GaAs at RT and 100°C",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150304-090025874",
    id = "record",
    isbn = "9780931837609",
    doi = "10.1557/PROC-93-67"
}