Division of Engineering and Applied Science (EAS)

Shapero, Aubrey; Liu, Yang; et al. (2016) Parylene-on-oil packaging for implantable pressure sensors; ISBN 978-1-5090-1973-1; 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016; IEEE: Piscataway, NJ; 403-406; 10.1109/MEMSYS.2016.7421646